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Light modulation element, array-type light modulation element, and flat-panel display unit

  • US 6,288,829 B1
  • Filed: 10/05/1999
  • Issued: 09/11/2001
  • Est. Priority Date: 10/05/1998
  • Status: Expired due to Fees
First Claim
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1. A light modulation element comprising:

  • a transparent substrate transparent for modulated light;

    a moving grid comprising a plurality of slits formed by arranging a plurality of grid plates each having a shield property and spaced from each other, said moving grid having at least a part having electrical conductivity;

    elastic support members for placing said moving grid with a predetermined spacing on said transparent substrate and supporting said moving grid movably in an arrangement direction of the grid plates;

    shield films formed at positions of said transparent substrate overlapping the slit positions of said moving grid; and

    moving grid move means for moving said moving grid in the arrangement direction of the grid plates by an electrostatic force generated by applying predetermined drive voltages to fixed electrodes placed on said transparent substrate and said moving grid, characterized in that as the moving grid is moved, a transmission factor of light passing through the slits is changed for executing light modulation.

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