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Planar vibratory gyroscopes

  • US 6,289,733 B1
  • Filed: 05/12/1999
  • Issued: 09/18/2001
  • Est. Priority Date: 05/12/1999
  • Status: Expired due to Term
First Claim
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1. A vibratory gyroscope that senses gyroscope angular rotation, comprising:

  • a planar member having;

    a) a plate that has a plate perimeter; and

    b) a plurality of elongate beams that support said plate wherein each of said beams has first and second ends and is arranged with its second end coupled to said plate perimeter and its first end proximate to the second end of an adjacent one of said beams;

    said planar member thereby configured for uncoupled vibrations about first and second vibration axes which respectively pass through the second ends of a first pair of said beams and the second ends of a second pair of said beams that alternate with said first pair about said plate perimeter;

    a control electrode system spaced from said plate and having a pair of control electrodes positioned on opposite sides of said first vibration axis to excite a controlled vibration of said plate about said first vibration axis; and

    a position-sensing system spaced from said plate and having a pair of sense electrodes positioned on opposite sides of said second vibration axis to sense a response vibration of said plate that is induced by said gyroscope angular rotation and converted by precession to be about said second vibration axis;

    said response vibration being a measure of said precession and thereby of said gyroscope angular rotation.

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