Sputtering method for forming dielectric films
First Claim
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1. A method of forming a dielectric film having a desired composition comprising:
- sputtering a high dielectric constant film onto a substrate to incorporate at least carbon into the high dielectric constant film in addition to those elements included in the desired composition of the high dielectric constant film wherein an ambient gas comprises Ar and CO2 and the ratio of Ar to CO2 is 1;
1; and
removing at least the carbon from the film.
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Abstract
A method for forming a dielectric film having a desired composition comprising sputtering a dielectric material onto a substrate to produce an intermediary film, the intermediary film incorporating one or more elements in addition to those elements included in the desired composition of the dielectric film; and removing the one or more additional elements from the intermediary film to produce the dielectric film having the desired composition.
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Citations
17 Claims
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1. A method of forming a dielectric film having a desired composition comprising:
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sputtering a high dielectric constant film onto a substrate to incorporate at least carbon into the high dielectric constant film in addition to those elements included in the desired composition of the high dielectric constant film wherein an ambient gas comprises Ar and CO2 and the ratio of Ar to CO2 is 1;
1; and
removing at least the carbon from the film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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- 13. The method of claim 13, wherein the growth rate of the intermediary film is approximately 20 Å
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16. A method of forming a dielectric film having a desired composition comprising:
sputtering a high dielectric constant film onto a substrate to incorporate at least carbon into the high dielectric constant film in addition to those elements included in the desired composition of the high dielectric constant film wherein an ambient gas comprises Ar and CO2 and the ratio of Ar to CO2 is 1;
1; and
annealing the film in an oxygen atmosphere.- View Dependent Claims (17)
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