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Zinc oxide films containing P-type dopant and process for preparing same

  • US 6,291,085 B1
  • Filed: 08/03/1998
  • Issued: 09/18/2001
  • Est. Priority Date: 08/03/1998
  • Status: Expired due to Term
First Claim
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1. A ZnO film on a substrate, the ZnO film containing a p-type dopant and having a net acceptor concentration of at least about 1018 acceptors/cm3, a resistivity no greater than about 1 ohm-cm, and a Hall Mobility of between about 0.1 and about 50 cm2/Vs.

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