Highly charged ion secondary ion mass spectroscopy

• US 6,291,820 B1
• Filed: 01/08/1999
• Issued: 09/18/2001
• Est. Priority Date: 01/08/1999
• Status: Expired due to Fees

• Current Assignee: Lawrence Livermore National Security LLC (Government of the United States of America)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Hamza, Alex V., Schenkel, Thomas, Schneider, Dieter H., Barnes, Alan V.
• Primary Examiner(s): Berman, Jack
• Assistant Examiner(s): Fernandez, Kalimah
• Application Number:
  US09/227,997
• Time in Patent Office: 984 Days
• Field of Search: 250/309, 250/287, 250/282
• US Class Current: 250/282
• CPC Class Codes: G01N 23/22 by measuring secondary emission from the material

Abstract

A secondary ion mass spectrometer using slow, highly charged ions produced in an electron beam ion trap permits ultra-sensitive surface analysis and high spatial resolution simultaneously. The spectrometer comprises an ion source producing a primary ion beam of highly charged ions that are directed at a target surface, a mass analyzer, and a microchannel plate detector of secondary ions that are sputtered from the target surface after interaction with the primary beam. The unusually high secondary ion yield permits the use of coincidence counting, in which the secondary ion stops are detected in coincidence with a particular secondary ion. The association of specific molecular species can be correlated. The unique multiple secondary nature of the highly charged ion interaction enables this new analytical technique.

Claims

1. A secondary ion mass spectrometer system, comprising:

a beam source comprising an electron beam ion trap for producing a primary ion beam of highly charged ions, wherein the beam is directed at a target surface to cause emission of sputtered secondary ions and electrons, from the target surface;

a mass analyzer into which are introduced the sputtered secondary ions; and

a detector of the charged particles, wherein the sputtered secondary ions are detected in coincidence with a start signal and a selected secondary ion.

2. A secondary ion mass spectrometer as recited in claim 1, wherein the detector is a microchannel plate detector that detects the start signal and secondary ions.

3. A secondary ion mass spectrometer as recited in claim 1, wherein the primary beam produces highly charged ions having a charge state greater than one.