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Three-dimensional type inductor for mixed mode radio frequency device

  • US 6,291,872 B1
  • Filed: 11/04/1999
  • Issued: 09/18/2001
  • Est. Priority Date: 11/04/1999
  • Status: Expired due to Term
First Claim
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1. A single loop type inductor for mixed mode radio frequency (RF) devices comprising:

  • a rectangular spiral structure having an outer end and an inner end, said rectangular spiral structure further comprises a plurality of insulating layers, a plurality of vertical direction contacts and a plurality of horizontal direction contacts, every horizontal direction contact is formed within different insulating layer by dual damascene process, and every vertical direction contact is also formed by dual damascene process but through at least one insulating layer and connected to two horizontal direction contacts.

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