Three-dimensional type inductor for mixed mode radio frequency device
First Claim
1. A single loop type inductor for mixed mode radio frequency (RF) devices comprising:
- a rectangular spiral structure having an outer end and an inner end, said rectangular spiral structure further comprises a plurality of insulating layers, a plurality of vertical direction contacts and a plurality of horizontal direction contacts, every horizontal direction contact is formed within different insulating layer by dual damascene process, and every vertical direction contact is also formed by dual damascene process but through at least one insulating layer and connected to two horizontal direction contacts.
1 Assignment
0 Petitions
Accused Products
Abstract
Vertical type structures for integrated circuit inductors are disclosed. These vertical type inductors include the single-loop type, the parallel-loop type and the screw type, which form three different embodiments in the present invention. In the first embodiment, three-dimensional type structures, a single-loop type is utilized as an integrated circuit inductor. This inductor structure is formed on a substrate and the axis of the structure is upright to the substrate. In another embodiment according to the present invention, a parallel-loop type structure for radio frequency (RF) integrated circuit inductor is provided. A screw type structure according to this invention is the third embodiment. It features an axis that is parallel to the surface of the substrate and threads into the semiconductor device.
-
Citations
19 Claims
-
1. A single loop type inductor for mixed mode radio frequency (RF) devices comprising:
-
a rectangular spiral structure having an outer end and an inner end, said rectangular spiral structure further comprises a plurality of insulating layers, a plurality of vertical direction contacts and a plurality of horizontal direction contacts, every horizontal direction contact is formed within different insulating layer by dual damascene process, and every vertical direction contact is also formed by dual damascene process but through at least one insulating layer and connected to two horizontal direction contacts. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A parallel loop type inductor for mixed mode radio frequency (RF) devices comprising:
-
at least two single loop type inductors, each of said single loop type inductors including, a rectangular spiral structure having an outer end and an inner end, said rectangular spiral structure further comprises a plurality of insulating layers, a plurality of vertical direction contacts and a plurality of horizontal direction contacts, every horizontal direction contact is formed within different insulating layer by dual damascene process, and every vertical direction contact is also formed by dual damascene process but through at least one insulating layer and connected to two horizontal direction contacts;
the outer end of a first single loop type inductor is connected to a source/drain region, and the inner end of said first single loop type inductor is connected to the inner end of a second single loop type inductor, thereafter the inner end connects to the inner end and the outer end connects to the outer end. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
-
Specification