Heat-treatable dichroic mirrors
First Claim
1. A heat-treatable dichroic mirror, comprising:
- a) a transparent substrate having a glass transition temperature in the range of 650-800°
C.;
b) a sputtered silicon nitride base film carried on said substrate and contiguous thereto;
c) a plurality of sputtered films carried on said substrate and forming at least two pairs of contiguous films, the films of each pair having disparate refractive indices differing by at least about 0.2 so as to provide between them a reflective interface, the films including a first film that is a member of a said contiguous film pair and comprising an oxide of a metal, a second film positioned further from the substrate than the first film and that is a member of a said contiguous film pair, the second film comprising an oxidizable metal or semi-metal, and a protective overcoat of a thickness and composition sufficient to substantially prevent permeation of oxygen therethrough when heat treated at said glass transition temperature, said mirror, after said heat treatment, exhibiting a transmittance of at least 24% in the wavelength range of 550-650 nm, a reflectance of at least 45%.
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Accused Products
Abstract
A heat-treatable dichroic mirror, comprising a transparent substrate having a glass transition temperature in the range of 650-800° C., and a plurality of sputtered films carried on said substrate and forming at least two pairs of contiguous films in which the films of each pair have disparate refractive indices differing by at least about 0.2 so as to provide between them a reflective interface. The films include an oxide of a metal such as titanium, a second film comprising an oxidizable metal or semi-metal such as silicon, and a protective overcoat of a thickness and composition sufficient to substantially prevent permeation of oxygen therethrough when heat treated at said glass transition temperature. The mirror, after said heat treatment, exhibits a transmittance of at least 24% in the wavelength range of 550-650 nm, a reflectance of at least 45%, and a haze of not greater than about 1%.
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Citations
19 Claims
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1. A heat-treatable dichroic mirror, comprising:
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a) a transparent substrate having a glass transition temperature in the range of 650-800°
C.;
b) a sputtered silicon nitride base film carried on said substrate and contiguous thereto;
c) a plurality of sputtered films carried on said substrate and forming at least two pairs of contiguous films, the films of each pair having disparate refractive indices differing by at least about 0.2 so as to provide between them a reflective interface, the films including a first film that is a member of a said contiguous film pair and comprising an oxide of a metal, a second film positioned further from the substrate than the first film and that is a member of a said contiguous film pair, the second film comprising an oxidizable metal or semi-metal, and a protective overcoat of a thickness and composition sufficient to substantially prevent permeation of oxygen therethrough when heat treated at said glass transition temperature, said mirror, after said heat treatment, exhibiting a transmittance of at least 24% in the wavelength range of 550-650 nm, a reflectance of at least 45%. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 11)
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10. A heat-treatable dichroic mirror, comprising:
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a) a transparent substrate having a glass transition temperature in the range of 650-800°
C.;
b) a sputtered silicon nitride base film carried on said substrate and contiguous thereto;
c) a plurality of sputtered films carried on said substrate and forming at least two pairs of contiguous films, the films of each pair having disparate refractive indices differing by at least about 0.2 so as to provide between them a reflective interface, the films including a first film that is a member of a said contiguous film pair and comprising an oxide of titanium, a second film positioned further from the substrate than the first film and that is a member of a said contiguous film pair, the second film comprising silicon, and a protective overcoat of a thickness and composition sufficient to substantially prevent permeation of oxygen therethrough when heat treated at said glass transition temperature, said titanium oxide first film including an impurity deposited therein during formation of said first film and in an amount sufficient to retard haze formation in said first contiguous film upon said heat treatment, the mole ratio of said impurity to said titanium oxide not exceeding 0.1.
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12. A heat-treatable dichroic mirror, comprising:
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a) a transparent substrate having a glass transition temperature in the range of 650-800°
C.;
b) a sputtered silicon nitride base film carried on said substrate and contiguous thereto;
c) a plurality of films carried on said substrate carried on said substrate and forming at least two pairs of contiguous films, the films of each pair having disparate refractive indices differing by at least about 0.2 so as to provide between them a reflective interface, the films including a first film that is a member of a said contiguous film pair and comprising an oxide of a metal selected from the group consisting of titanium, zinc, niobium, tin, bismuth and alloys thereof, a second film positioned further from the substrate than the first film and that is a member of a said contiguous film pair, the second film comprising an oxidizable element selected from the group consisting of silicon, niobium, aluminum, nickel, chromium, and alloys thereof, and a protective overcoat of silicon nitride of a thickness and composition sufficient to substantially prevent permeation of oxygen therethrough when said mirror is heat treated at said glass transition temperature, said mirror, after said heat treatment, exhibiting a transmittance of at least 24%, a reflectance of at least 45%. - View Dependent Claims (13, 14, 18, 19)
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15. Method of making a dichroic mirror comprising magnetron sputter coating upon a transparent substrate having a glass transition temperature in the range of 650-800°
- C. a silicon nitride base film contiguous to said substrate and a plurality of sequential films forming at least two pairs of contiguous films, the films of each pair having disparate refractive indices differing by at least about 0.2 so as to provide between them a reflective interface, the films including a first film, the coating further including a protective overcoat of a thickness and composition sufficient to substantially prevent permeation of oxygen therethrough when said mirror is heat treated at said glass transition temperature, the method including the step of incorporating in said first metal oxide film an impurity at a mole ratio of said impurity to said metal oxide in the range of 0.001 to 0.1.
- View Dependent Claims (16, 17)
Specification