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Method and system for identifying defects in a semiconductor

  • US 6,292,582 B1
  • Filed: 05/30/1997
  • Issued: 09/18/2001
  • Est. Priority Date: 05/31/1996
  • Status: Expired due to Term
First Claim
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1. A method for associating a descriptive label with an anomaly on a manufactured object, the method comprising:

  • placing the manufactured device on a moveable stage;

    capturing and preparing a digital-pixel-based representation of the image;

    symbolically decomposing the digital-pixel-based representation of the image to create a primitive-based representation of the image;

    comparing the primitive-based representation of the image to a primitive-based reference image to detect and locate the anomaly;

    isolating primitives associated with the anomaly;

    comparing the isolated primitives with primitives in a knowledgebase to locate a set of primitives in the knowledgebase most like the isolated primitives associated with the anomaly; and

    assigning a label associated with the set of primitives in the knowledgebase that was most similar to the isolated primitives, wherein highly-determinative primitives in the knowledgebase are weighted more heavily than others to assist in arriving at a more accurate label.

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