Method of making a fluid flow module

• US 6,293,012 B1
• Filed: 04/26/2000
• Issued: 09/25/2001
• Est. Priority Date: 07/21/1997
• Status: Expired due to Term

• Current Assignee: YSI Incorporated (Xylem, Inc.)
• Original Assignee: YSI Incorporated (Xylem, Inc.)
• Inventors: Moles, Donald R.
• Primary Examiner(s): ROSENBAUM, IRENE CUDA
• Application Number:
  US09/558,789
• Time in Patent Office: 517 Days
• Field of Search: 298/901.24, 298/901.26, 298/901.27, 298/901.32, 295/05, 295/20, 73/530.1, 251/61.1
• US Class Current: 29/890.124
• CPC Class Codes: B01L 2200/0689 Sealing
• CPC Class Codes: B01L 2300/0874 Three dimensional network
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2400/0638 membrane valves, flap valves
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502738 characterised by integrated valves microvalves F16K99/0001
• CPC Class Codes: B29C 66/8264 using the thermal expansion of the parts to be joined
• CPC Class Codes: B32B 27/34 comprising polyamides
• CPC Class Codes: B32B 3/08 characterised by added members at particular parts layer formed of separate pieces of material which are juxtaposed side-by-side B32B3/14, B32B3/18
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0084 Chemistry or biology, e.g. "lab-on-a-chip" technology
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0059 actuated by a pilot fluid
• CPC Class Codes: G01N 2035/00247 Microvalves
• CPC Class Codes: Y10T 29/49412 with assembly, disassembly or composite article making
• CPC Class Codes: Y10T 29/49426 including metal shaping and diverse operation

Abstract

A method of fabricating a module having fluid flow channels in communication with a diaphragm valve using self-bondable polyimide sheets wherein the sheets are directly interfacially bonded to one another except in the region corresponding to the diaphragm valve without using an adhesive is disclosed.

Claims

1. A method of fabricating a module having fluid flow channels in communication with a diaphragm valve which comprises applying a release agent to a surface of a first sheet of an adhesiveless self-bondable thermoset polyimide in a region corresponding to said diaphragm valve, assembling said first sheet with a second sheet of adhesiveless self-bondable thermoset polyimide, one of said first and second sheets having a channel formed therein, which is in fluid communication with said diaphragm valve;

and interfacially and directly bonding said first sheet to said second sheet except in said region corresponding to said diaphragm valve without using an adhesive.

2. The method of claim 1 wherein said first sheet functions as said diaphragm valve in said valve region, said second sheet includes at least one channel in fluid communication with said diaphragm valve and said release agent is applied to said second sheet in the region corresponding to said diaphragm valve.

3. The method of claim 1 wherein said method includes the additional step of assembling said first and second sheets with a third sheet of self-bondable thermoset polyimide, and at least one of said second sheet and said third sheet have a channel in the surface thereof such that a channel is present at the interface of said second and third sheets, and said step of directly and interfacially bonding said first sheet to said second sheet additionally includes directly and interfacially bonding said second sheet to said third sheet.

4. The method of claim 1 wherein said polyimide sheets contain an organotin compound.

5. The method of claim 1 wherein said method additionally includes providing a valve actuator operatively associated with said valve region for selectively flexing said sheet and thereby opening and closing said valve.

6. The method of claim 1 wherein said first, second and third polyimide sheets are bonded together without an adhesive to form a monolithic structure.

7. The method of claim 1 wherein said step of applying said release agent comprises applying Al₂O₃ to said region corresponding to said diaphragm valve by radio frequency sputtering an Al₂O₃ target.

8. The method of claim 7 wherein said first sheet is transported through the radio frequency generated discharge of said Al₂O₃ target.

9. The method of claim 1 wherein the release agent is selected from the group consisting of Al₂O₃, diamond-like carbon, or metal.

10. The method of claim 1 wherein said release agent is a silicone or a perfluoro release agent.

11. The method of claim 1 wherein said release agent is platinum.