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Structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope

  • US 6,293,148 B1
  • Filed: 12/02/1999
  • Issued: 09/25/2001
  • Est. Priority Date: 04/30/1999
  • Status: Expired due to Fees
First Claim
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1. A motion sensor apparatus comprising:

  • a primary mass;

    a primary flexure structure supporting said primary mass to experience driven motion against a bias of said primary flexure structure;

    a secondary mass which is less massive than said primary mass; and

    a secondary flexure structure which interconnects said secondary mass with said primary mass and which supports said secondary mass to experience sensing motion relative to said primary mass against a bias of said secondary flexure structure;

    a stiffness ratio between said primary and secondary flexure structures being equal to a mass ratio between said primary and secondary masses.

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