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Throttle gate valve

  • US 6,293,306 B1
  • Filed: 07/10/2000
  • Issued: 09/25/2001
  • Est. Priority Date: 07/09/1999
  • Status: Expired due to Fees
First Claim
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1. A throttle gate valve, comprisinga housing defining a thru-opening for controlling vacuum within a process chamber, a gate valve movable between open and closed positions, in the closed position closing off the thru-opening to prevent the passage of process gases, a linear conductance throttle vane movably mounted within the thru-opening for throttling flow of gases through the thru-opening when the gate valve is in its open position, and a drive mechanism for moving the throttle vane in order to vary flow of the process gases, the drive mechanism including a linear drive actuator extending into the housing and including a bellows shield to prevent escape of gases where the linear drive actuator extends into the housing.

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