Multiple detecting apparatus for physical phenomenon and/or chemical phenomenon
First Claim
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1. A detector assembly for detecting a plurality of different properties in a sample, comprising:
- a semiconductor substrate;
a first detector unit on the substrate for measuring a first property of the sample; and
a second detector unit on the substrate for measuring a second property of the sample, each of the first detector unit and second detector unit share a common sensor element and provide electrical charge output signals representative of respectively the first property and the second property.
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Abstract
A detector assembly for detecting a plurality of different properties at the same location at the same time is provided by integrating onto a single semiconductor substrate a first detector unit for measuring a first property and a second detector unit for measuring a second property. The first and second detector units can share, for example, a common element, such as a sensor device that can provide electrical output signals representative of, respectively, the first property and the second property. The common element can include a diaphragm with a pyroelectric element to provide a measurement of temperature and pressure.
87 Citations
26 Claims
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1. A detector assembly for detecting a plurality of different properties in a sample, comprising:
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a semiconductor substrate;
a first detector unit on the substrate for measuring a first property of the sample; and
a second detector unit on the substrate for measuring a second property of the sample, each of the first detector unit and second detector unit share a common sensor element and provide electrical charge output signals representative of respectively the first property and the second property. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 24, 25, 26)
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16. A detector assembly for measuring pressure and temperature comprising:
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a semiconductor substrate;
a diaphragm member extending over an etched portion of the substrate;
a pyroelectric element mounted on the diaphragm;
means for measuring a change in pressure applied to the diaphragm, including a plurality of transistors formed on the semiconductor substrate; and
means for measuring temperature, including the pyroelectric element mounted on the diaphragm. - View Dependent Claims (17, 18, 19)
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20. A detector assembly for detecting a plurality of different properties of a specimen, comprising:
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a semiconductor substrate, a first detector unit on the substrate for measuring light intensity including a sensing unit to detect light;
a second detector unit on the substrate for measuring an ion concentration operatively connected to the sensing unit to detect ion concentration;
a first diffusion region in the substrate adjacent the sensing unit to function as an input diode;
means for applying a voltage to the first diffusion region;
a second diffusion region in the substrate adjacent the sensing unit to collect a charge from the sensing unit; and
means for removing a charge from the second diffusion region as an output signal wherein the means for applying a voltage can enable an output signal from the sensing unit to represent measurements of respectively light and ion concentration from a common sensing element. - View Dependent Claims (21)
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22. A detector assembly for detecting light, pressure and temperature, comprising:
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a unitary semiconductor substrate;
a first portion of the substrate formed into a diaphragm;
a pressure detector unit including a plurality of channel transistors provided on the diaphragm to detect pressure on the basis of a change in channel conductance of the channel transistors when pressure is applied to the diaphragm;
a pyroelectric detector unit positioned above the diaphragm wherein the channel transistors and an output of the channel transistors provides a measurement of temperature; and
a photo diode unit positioned on the substrate to measure light. - View Dependent Claims (23)
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Specification