Method of manufacturing organic thin-film EL device

• US 6,294,892 B1
• Filed: 12/22/1999
• Issued: 09/25/2001
• Est. Priority Date: 12/22/1998
• Status: Expired due to Term

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: NEC Corporation
• Inventors: Saitoh, Takeshi, Utsugi, Koji, Tamegai, Masashi
• Primary Examiner(s): Ip, Paul
• Application Number:
  US09/470,513
• Time in Patent Office: 643 Days
• Field of Search: 318/599, 318/560, 318/561, 318/630, 318/632, 318/639, 318/640, 356/400, 356/401, 250/548, 250/557, 250/559.3, 345/60, 427/66, 427/8, 427/69, 427/70, 427/68, 427/162, 427/226, 427/561, 427/282, 430/7, 430/200, 430/201
• US Class Current: 318/640
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: H05B 33/10 Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

Abstract

In a method of manufacturing an organic thin-film electroluminescent device, a plurality of thin-film luminescent portions are arranged with fine pitches on a substrate. Each of the luminescent portions is formed by organic electroluminescent material or electrode material. A mask pattern is arranged on a pattern mask moving stage which finely moves in a predetermined direction. The substrate is arranged on a substrate moving stage. The substrate is opposed against the pattern mask with a predetermined pitch. An initial positioning alignment between the substrate and the pattern mask is performed by adjusting the substrate moving stage. The luminescent material is vaporized onto a surface of the substrate through the pattern mask. The luminescent material is vaporized on the surface of the substrate after moving the pattern mask onto a non-vaporizing portion of the surface of the substrate.

Claims

1. A method of manufacturing an organic thin-film electroluminescent device in which a plurality of thin-film luminescent portions, each of which is formed by organic electroluminescent material or electrode material, are arranged with fine pitches on a substrate, comprising the steps of;

arranging a mask pattern on a pattern mask moving stage which finely moves in a predetermined direction;

arranging the substrate on a substrate moving stage;

opposing the substrate against the pattern mask with a predetermined pitch;

performing an initial positioning alignment between the substrate and the pattern mask by adjusting the substrate moving stage;

vaporizing the luminescent material onto a surface of the substrate through the pattern mask;

vaporizing the luminescent material on the surface of the substrate after moving the pattern mask onto a non-vaporizing portion of the surface of the substrate by moving the pattern mask moving stage in parallel to the substrate; and

whereby, forming arrangement of the luminescent portions on the surface of the substrate.

2. A method as claimed in claim 1, wherein:

the pattern mask moving stage independently and finely moves in X and Y directions perpendicular to each other for a pattern plane by controlling and driving by a pulse control motor.

3. A method as claimed in claim 2, wherein:

the pulse control motor comprises a DC servo motor.

4. A method as claimed in claim 1, wherein:

the substrate moving stage comprises a z-axis gate means which adjusts a distance and a swing angle between the substrate and the pattern mask, a rotation means which adjusts a rotation angle between the substrate and the pattern mask, and a substrate moving means which moves the substrate in parallel to the pattern mask in order to achieve fine adjustment.

5. A method as claimed in claim 4, wherein:

the z-axis gate means is finely controlled and driven by a pulse control motor.

6. A method as claimed in claim 5, wherein:

the pulse control motor comprises a DC servo motor.

7. A method as claimed in claim 4, wherein:

the rotation means is finely controlled and driven by a pulse control motor.

8. A method as claimed in claim 7, wherein:

the pulse control motor comprises a DC servo motor.

9. A method as claimed in claim 4, wherein:

the substrate moving means is finely controlled and driven by a pulse control motor.

10. A method as claimed in claim 9, wherein:

the pulse control motor comprises a DC servo motor.

11. A method as claimed in claim 1, wherein:

the pattern mask moving stage comprises a z-axis gate means which adjusts a distance and a swing angle between the substrate and the pattern mask, a rotation means which adjusts a rotation angle between the substrate and the pattern mask, and a pattern mask moving means which moves the pattern mask in parallel to the substrate in order to achieve fine adjustment.

12. A method as claimed in claim 11, wherein:

the z-axis gate means is finely controlled and driven by a pulse control motor.

13. A method as claimed in claim 12, wherein:

the pulse control motor comprises a DC servo motor.

14. A method as claimed in claim 11, wherein:

the rotation means is finely controlled and driven by a pulse control motor.

15. A method as claimed in claim 14, wherein:

the pulse control motor comprises a DC servo motor.

16. A method as claimed in claim 11, wherein:

the pattern mask moving means is finely controlled and driven by a pulse control motor.

17. A method as claimed in claim 16, wherein:

the pulse control motor comprises a DC servo motor.

18. A method as claimed in claim 1, wherein:

the pulse control motor is driven and controlled by the use of a digital input instruction system containing a feedback system.

19. A method as claimed in claim 18, wherein:

the digital input instruction comprises incremental instruction.

20. A method as claimed in claim 2, wherein:

the pulse control motor has a rotation angle sensor.

21. A method as claimed in claim 20, wherein:

the rotation angle sensor has a pulse encoder of an incremental instruction system.

22. A method as claimed in claim 1, further comprising the following steps of:

utilizing a magnetic suction pattern mask;

arranging a magnetic field generating source at a back side in which the luminescent portions are not formed on the substrate; and

whereby, sucking the pattern mask to the substrate surface by the use of the magnetic field.

23. A method as claimed in claim 1, wherein.

an insulating pitch is formed at a surface in which the luminescent portions are formed.

24. A method as claimed in claim 23, wherein:

a film thickness of the insulating pitch is thicker than a film thickness of the luminescent portion.