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High precision image alignment detection

  • US 6,295,083 B1
  • Filed: 02/27/1998
  • Issued: 09/25/2001
  • Est. Priority Date: 02/27/1998
  • Status: Expired due to Term
First Claim
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1. A method of high precision image alignment detection for registering an image with a reference image comprising the steps of:

  • locating a multiple line alignment pattern in the image by cross-correlation with a reference image corresponding to the alignment pattern; and

    iteratively detecting a precision part pixel shift value for the image using data points from the image determined by an integer pixel shift value achieved by cross-correlation of the reference image and a portion of the located alignment pattern from the image, the data points being measured to determine an initial part pixel shift value and each successive iteration being performed on the data points for the image as shifted by the sum of the part pixel shift values from prior iterations until the precision part pixel shift value is achieved according to specified end conditions.

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