Digital optical chemistry micromirror imager

• US 6,295,153 B1
• Filed: 06/04/1999
• Issued: 09/25/2001
• Est. Priority Date: 06/04/1998
• Status: Expired due to Term

• Current Assignee: Roche NimbleGen, Inc. (Roche Holding AG)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Garner, Harold R.
• Primary Examiner(s): Phan, James
• Application Number:
  US09/326,526
• Time in Patent Office: 844 Days
• Field of Search: 359/201, 359/202, 359/212, 359/223, 359/224, 435/6
• US Class Current: 359/212.1
• CPC Class Codes: B01J 19/0046 Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays synthesis methods per se C40B50/00
• CPC Class Codes: B01J 2219/00439 using micromirror arrays
• CPC Class Codes: B01J 2219/00527 Sheets
• CPC Class Codes: B01J 2219/00529 DNA chips
• CPC Class Codes: B01J 2219/00576 fluorophore
• CPC Class Codes: B01J 2219/00585 Parallel processes
• CPC Class Codes: B01J 2219/0059 Sequential processes
• CPC Class Codes: B01J 2219/00596 Solid-phase processes
• CPC Class Codes: B01J 2219/00605 the compounds being directly bound or immobilised to solid supports
• CPC Class Codes: B01J 2219/00608 DNA chips
• CPC Class Codes: B01J 2219/00612 the surface being inorganic
• CPC Class Codes: B01J 2219/00617 by chemical means
• CPC Class Codes: B01J 2219/00626 Covalent
• CPC Class Codes: B01J 2219/00637 by coating it with another layer
• CPC Class Codes: B01J 2219/00659 Two-dimensional arrays
• CPC Class Codes: B01J 2219/00675 In-situ synthesis on the substrate
• CPC Class Codes: B01J 2219/00689 using computers
• CPC Class Codes: B01J 2219/00704 integrated with the reactor apparatus
• CPC Class Codes: B01J 2219/00711 Light-directed synthesis
• CPC Class Codes: B01J 2219/00722 Nucleotides
• CPC Class Codes: B82Y 30/00 : Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C40B 40/06 : Libraries containing nucleotides or polynucleotides, or derivatives thereof
• CPC Class Codes: G01J 2003/1278 : Mask with spectral selection
• CPC Class Codes: G02B 26/0833 : the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G03F 7/2002 : with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
• CPC Class Codes: G03F 7/2053 : using a laser ablative removal B41C
• CPC Class Codes: G03F 7/70291 : Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70375 : Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation

Abstract

An apparatus and method for catalyzing a reaction on a substrate (24) comprising, a light source (12), a micromirror (16) positioned to redirect light (14) from the light source (12) toward a substrate (24) wherein the redirected light (14) catalyzes a chemical reaction proximate a substrate (24), is disclosed. A computer (18) is connected to, and controls, the positioning of mirrors within the micromirror (16) to specifically redirect light to specific portions of a substrate. The substrate (24) can be placed in a reaction chamber (50), wherein the light (14) that is redirected by the micromirror (16) catalyzes a chemical reaction proximate a substrate (24).

Claims

1. An apparatus for catalyzing a reaction on a substrate comprising:

a light source;

a micromirror positioned to redirect light from said light source toward said substrate;

a diffusion lens between said light source and said micromirror;

a computer connected to, and controlling, said micromirror, and

a reaction chamber is placed in the path of light redirected by said micromirror, wherein light that is redirected by said micromirror catalyzes a chemical reaction proximate said substrate in said reaction chamber.

2. The apparatus of claim 1 wherein said light interacts with a novolak resin proximate said substrate to produce a photoresist pattern.

3. The apparatus of claim 1 further comprising:

a reaction chamber disposed about said substrate;

one or more reactant lines connected to said reaction chamber;

one or more reaction chemicals connected to said reactant lines; and

a computer connected to, and controlling, the supply of said one or more reaction chemicals to said reaction chamber via said reactant lines.

4. The apparatus of claim 3 wherein said one or more of said reaction chemicals is involved in a chemical reaction when exposed to light.

5. An apparatus for catalyzing a reaction on a substrate comprising:

a light source;

a micromirror positioned to redirect light from said light source toward said substrate;

a diffusion lens between said light source and said micromirror;

a reaction chamber disposed about said substrate;

one or more reactant lines connected to said reaction chamber;

one or more reaction chemicals connected to said reactant lines; and

a computer connected to, and controlling, said micromirror and the supply of said one or more reaction chemicals to said reaction chamber via said reactant lines, wherein a light catalyzable reaction occurs proximate to the site where light produced by said light source and redirected by said micromirror strikes said substrate.

6. The apparatus of claim 5 wherein said light source is a UV light.

7. The apparatus of claim 5 wherein said light source is a xenon lamp, or a mercury lamp, or a laser or a combination thereof.

8. The apparatus of claim 5 further a lens system comprising:

a diffusion lens between said light source and said micromirror; and

a lens between said micromirror and said substrate.

9. The apparatus of claim 5 wherein said micromirror is further defined as a micromirror array.

10. The apparatus of claim 5 wherein said light interacts with a novolak resin proximate said substrate to produce a photoresist pattern.

11. The apparatus of claim 5 wherein said light catalyzes the synthesis of a nucleotide base proximate said substrate.

12. The apparatus of claim 5 wherein said light catalyzes the synthesis of an amino acid residue proximate said substrate.

13. The apparatus of claim 5 wherein said light catalyzes a reaction involving a molecule proximate said substrate.

14. The apparatus of claim 5 wherein said light crosslinks a molecule proximate said substrate.

15. The apparatus of claim 5 further comprising a total internal reflection mirror disposed in a position to redirect light from said light source into said micromirror and from said micromirror array toward said substrate.

16. The apparatus of claim 5 wherein said substrate is mounted on a movable platform that can be controlled via a computer to allow for multiple repetitive exposures of said substrate to light reflected by said micromirror.