Pretreatment process for a surface texturing process

• US 6,296,740 B1
• Filed: 04/24/1995
• Issued: 10/02/2001
• Est. Priority Date: 04/24/1995
• Status: Expired due to Fees

• Current Assignee: SI Diamond Technology, Inc. (Nano Magic, Inc.)
• Original Assignee: SI Diamond Technology, Inc. (Nano Magic, Inc.)
• Inventors: Xie, Chenggang, Eichman, Dean Joseph
• Primary Examiner(s): MCDONALD, RODNEY GLENN
• Application Number:
  US08/427,462
• Time in Patent Office: 2,353 Days
• Field of Search: 204/192.11, 204/192.13, 204/192.15, 204/192.26, 204/192.3, 204/192.32, 204/192.33, 204/192.34, 156/626.1, 156/636.1, 156/637.1, 156/639.1, 156/640.1, 156/643.1, 156/645.1, 216/23, 216/24, 216/37, 216/52, 216/53, 216/57, 216/60, 216/66, 427/524, 427/534, 427/551, 427/560, 427/248.1, 437/228
• US Class Current: 204/192.11
• CPC Class Codes: C23C 14/028 Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
• CPC Class Codes: C23C 14/22 characterised by the process of coating

Abstract

Before submitting a sample, including a first material layered upon a substrate, to an ion milling process, whereby a second material is sputtered onto the surface of the first material and the sample is then submitted to an etching process, an irregularity is formed on the surface of the first material. The overall process results in the formation of cones, or micro-tip structures, which may then be layered with a layer of low work function material, such as amorphous diamond. The irregularity in the surface of the first material may be formed by polishing, sandblasting, photolithography, or mechanical means such as scratching.

Claims

1. A method of fabricating micro-tips, said method comprising the steps of:

providing a substrate;

depositing a first material on said substrate;

producing irregularities across at least a selected area on a surface of said deposited first material to provide increased uniformity of sites for forming said micro-tips;

sputtering a second material onto said surface on said first material; and

etching said first material, wherein said step of producing irregularities across an area on a surface of said deposited first material further comprises the step of swiping said surface with a polishing solution.

2. The method as recited in claim 1, wherein said polishing solution is an aerosol diamond spray.

3. The method as recited in claim 1, wherein said polishing solution is Al2O3+DI-H2O.

4. A method of fabricating micro-tips, said method comprising the steps of:

providing a substrate;

depositing a first material on said substrate;

producing irregularities across at least a selected area on a surface of said deposited first material to provide increased uniformity of sites for forming said micro-tips;

sputtering a second material onto said surface on said first material; and

etching said first material, wherein said step of producing an irregularity on a surface of said deposited first material further comprises the step of sandblasting said surface.

5. A method of fabricating micro-tips, said method comprising the steps of:

providing a substrate;

depositing a first material on said substrate;

producing irregularities across at least a selected area on a surface of said deposited first material to provide increased uniformity of sites for forming said micro-tips;

sputtering a second material onto said surface on said first material; and

etching said first material, wherein said step of producing an irregularity on a surface of said deposited first material further comprises the step of;

depositing a strip of a third material on said substrate prior to said step of depositing said first material on said substrate resulting in a production of a stepped surface on said first material after said step of depositing said first material on said substrate.