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Method of manufacturing an apparatus controlling light

  • US 6,300,154 B2
  • Filed: 12/12/2000
  • Issued: 10/09/2001
  • Est. Priority Date: 08/28/1997
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing a shutter, comprising:

  • providing a substrate with an aperture defined therein and at least two layers deposited thereon; and

    lithographically etching a portion of a first layer and a portion of the substrate to isolate a freestanding portion of the second layer with respect to the substrate, the freestanding portion of the second layer forming a portion of the shutter which is moved with respect to the substrate to control incident light passing through the aperature of the substrate.

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