Repeatable end point method for anisotropic etch of inorganic buried anti-reflective coating layer over silicon

• US 6,300,251 B1
• Filed: 02/10/2000
• Issued: 10/09/2001
• Est. Priority Date: 02/10/2000
• Status: Expired due to Fees

• Current Assignee: Chartered Semiconductor Manufacturing Incorporated (Mamoura Diversified Global Holding PJSC)
• Original Assignee: Chartered Semiconductor Manufacturing Incorporated (Mamoura Diversified Global Holding PJSC)
• Inventors: Chhagan, Vijakomar, Pradeep, Yelehanka Ramachandramurthy, Gerung, Henry
• Primary Examiner(s): Bowers, Charles
• Assistant Examiner(s): Smoot, Stephen W.
• Application Number:
  US09/501,967
• Time in Patent Office: 607 Days
• Field of Search: 438/710, 438/733, 438/715, 438/719, 438/723, 438/299, 438/592
• US Class Current: 438/710
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/32137 of silicon-containing layers
• CPC Class Codes: H01L 21/32139 using masks

Abstract

A method for anisotropically etching a partially manufactured semiconductor structure, more specifically, a stacked FET gate structure containing a bottom anti-reflective coating (Barc) layer is described. The structure is covered with a photoresist layer which is patterned to defines the gate region. The processing chemistry is predominantly carbon tetrafluoride, (CF₄) with the inclusion of chlorine (Cl₂) where fluorine (F) is generated in the plasma as the etchant for the structure. During processing, the wafer is cooled with helium (He) that lowers the wafer temperature and promotes sidewall deposition from the fluorine species which acts as a passivation layer producing a anisotropic or vertical etch profile. The process reduces etch time and results in very repeatable end point control of the Bark etch and poly cap etch improving the control of the structure critical dimensions and improving process throughput. The reduction in the use of fluorine based species reduces any potential environmental impact.

Claims

1. The process of etching a first and second layer on a multilayer self aligned gate structure on a suitable substrate through a patterned resist layer which will have a repeatable end point and reduced etch end point time which process comprises:

etching said layers with a gas flow mixture of chlorine (Cl₂) and carbon tetrafluoride (CF₄) and helium (He) gases into a plasma reactive etching chamber containing said gate structure;

detecting the etch endpoint of said first layer;

etching said second layer of said gate structure with the same gas mixture;

detecting the endpoint of said second layer etch;

performing a 100% over etch to assure no residue of said layers remains;

completing the etching and fabrication of said gate structure.

2. The process of claim 1 wherein said first layer is an inorganic bottom antireflective coating layer (Barc) composed of Si_xO_yN_z to a thickness of between 100 and 500 Å

.

3. The process of claim 1 wherein said second layer is a polysilicon (poly) layer to a thickness of between 500 and 1000 Å

.

4. The process of claim 1 wherein the flow of said Cl₂ is between 10 and 100 sccm.

5. The process of claim 1 in which the flow of said CF₄ is between 10 and 100 sccm.

6. The process of claim 1 in which the flow of said He gas is between 10 and 200 sccm.

7. The process of claim 1 whereby the molar ratio of said Cl₂ to CF₄ to He is 3:

5;

5.

8. The process of claim 1 in which during the flow of said gases the radio frequency power of said plasma reactive etching chamber is between 100 and 500 watts for an upper plate, and between 50 and 500 watts for a bottom plate.

9. The process of claim 1 in which said etch chamber is a vacuum chamber and has a vacuum of less that 100 mT and a temperature between 20 and 100°

C.

10. The process of claim 1 whereby the wavelength of a photodiode optical detector used to detect etching endpoints is between 200 and 500 nm.

11. The process of etching a SAG gate structure from a multilayer structure patterned with photoresist on top of a first layer consisting of a Barc material, and a second layer consisting of polysilicon cap, which said process minimizes or eliminates the undercutting of the polysilicon layer and minimizes Barc etch time which process consists of:

etching said first layer with a gas flow mixture of chlorine (Cl₂) and carbon tetrafluoride (CF₄) and helium (He) gases into a plasma reactive etching chamber containing said gate structure;

detecting the etch endpoint of said first layer;

etching said second layer of said gate structure with the same gas mixture;

passivating a sidewall with a polymer coating created by the fluorine based species while cooling the structure with He providing an anisotropic etch profile;

detecting the endpoint of said second layer etch;

performing an 100% over etch to assure no residue of said layers remains;

completing the etching and fabrication of said gate structure.

12. The process of claim 11 wherein said Barc layer is composed of Si₂O_yN_z to a thickness of between 100 and 500 Å

.

13. The process of claim 11 wherein said second layer is a polysilicon (poly) layer to a thickness of between 500 and 1000 Å

.

14. The process of claim 11 wherein the flow of said Cl₂ is between 10 and 100 sccm.

15. The process of claim 11 in which the flow of said CF₄ is between 10 and 100 sccm.

16. The process of claim 11 in which the flow of said He gas is between 10 and 200 sccm.

17. The process of claim 11 whereby the molar ratio of said Cl₂ to CF₄ He is 3:

5;

5.

18. The process of claim 11 whereby the flow of said cooling He is between 10 and 200 sccm.

19. The process of claim 11 in which during the flow of said gases the radio frequency power of said plasma reactive etching chamber is between 100 and 500 watts. for an upper plate, and between 50 and 500 watts for a bottom plate.

20. The process of claim 11 in which said etch chamber is a vacuum chamber and has a vacuum of less than 100 mT and a temperature between 20 and 100°

C.

21. The process of claim 11 whereby the wavelength of a photodiode optical detector used to detect etching endpoints is between 200 and 500 nm.

22. The process of etching a SAG gate from a multilayer structure containing a top first Barc layer followed by tungsten silicide, polysilicon and gate oxide layers which process minimizes the variation in structure critical as well as dimensions as well as preserving the proper integrity of the multilayer elements by producing a well controlled Barc etch which process consists of:

etching said first Barc layer with a gas flow mixture of chlorine (Cl₂) and carbon tetrafluoride (CF₄) and helium (He) gases into a plasma etching chamber containing said gate structure;

detecting the etch endpoint of said first Barc layer;

cooling said gate structure with He to enable sidewall passivation from polymer created by said fluorine species during etching providing an anisotropic etch profile;

performing an 100% over etch to assure no residue of said first layer remains;

completing the etching and fabrication of said gate structure.

23. The process of claim 22 wherein said first Barc layer is composed of Si_xO_yN_z to a thickness of between 100 and 500 Å

.

24. The process of claim 22 wherein the flow of said Cl₂ is between 10 and 100 sccm.

25. The process of claim 22 in which the flow of said CF₄ is between 10 and 100 sccm.

26. The process of claim 22 in which the flow of said He gas is between 10 and 200 sccm.

27. The process of claim 22 whereby the molar ratio of said Cl₂ to CF₄ to He is 3:

5;

5.

28. The process of claim 22 whereby the flow of said cooling He gas is between 10 and 200 sccm.

29. The process of claim 22 in which during the flow of said gases the radio frequency power of said plasma reactive etching chamber is between 100 and 500 watts for an upper plate, and between 50 and 500 watts for a bottom plate.

30. The process of claim 22 in which said etch chamber is a vacuum chamber and has a vacuum of less than 100 mT and a temperature between 20 and 100°

C.

31. The process of claim 22 whereby the wavelength of a photodiode optical detector used to detect etching endpoints is between 200 and 500 nm.