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Process for modifying surfaces of materials, and materials having surfaces modified thereby

  • US 6,300,641 B1
  • Filed: 09/09/1998
  • Issued: 10/09/2001
  • Est. Priority Date: 04/19/1996
  • Status: Expired due to Term
First Claim
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1. A process for chemically reacting the surface of ceramic material, comprising irradiating a ceramic surface with 1014 to 5×

  • 1017 ions/cm2 of energized ion particles while contacting the ceramic surface with 1-8 ml/min of a reactive gas under a vacuum condition,wherein the reactive gas chemically reacts with the surface of the ceramic.

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