Solid immersion lens structures and methods for producing solid immersion lens structures

• US 6,301,055 B1
• Filed: 08/16/2000
• Issued: 10/09/2001
• Est. Priority Date: 08/16/2000
• Status: Expired due to Term

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Legrand, Olivier, Quake, Stephen R.
• Primary Examiner(s): NGUYEN, THONG Q
• Application Number:
  US09/640,907
• Time in Patent Office: 419 Days
• Field of Search: 359/368-369, 359/385, 359/392, 359/396-398, 359/642, 359/808, 359/809-811, 359/819-820, 359/900, 359/664, 164/159, 264/230, 264/272.11, 264/400, 264/1.7, 264/1.8, 264/2.5, 264/626.2
• US Class Current: 359/642
• CPC Class Codes: B29C 33/50 elastic or flexible for isostatic pressing B29C43/3642
• CPC Class Codes: B29C 39/02 for making articles of definite length, i.e. discrete articles
• CPC Class Codes: B29C 39/021 by casting in several steps
• CPC Class Codes: B29C 39/36 Removing moulded articles
• CPC Class Codes: B29D 11/00394 Producing solid immersion lenses [SIL]
• CPC Class Codes: B29D 11/00432 Auxiliary operations, e.g. machines for filling the moulds B29D11/00125 takes precedence
• CPC Class Codes: G02B 21/00 Microscopes
• CPC Class Codes: G02B 3/00 Simple or compound lenses
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A solid immersion lens structure is a translucent pliant elastomer cast to a desired shape and smoothness. A method for construction of a solid immersion lens structure includes providing a mold defining a lens shaped cavity in which a solid immersion lens is cast, casting a translucent liquid elastomeric material into the lens cavity, permitting the elastomeric material to set to form the solid immersion lens portion and removing the solid immersion lens portion from the mold. A specific material for use as the solid immersion lens is a translucent silicone elastomer of a refractive index greater than n=1.4, such as General Electric RTV 615.

Claims

1. A method for constructing a solid immersion lens structure, the method comprising:

producing a mold so as to define a pliant lens cavity in which a spherical solid immersion lens portion of the solid immersion lens structure is to be formed, the pliant lens cavity having an orifice having a transverse dimension less than a transverse dimension of the lens cavity for the spherical solid immersion lens portion;

casting a moldable material, from which at least the solid immersion lens portion is to be formed, into at least the lens cavity;

permitting the moldable material to set thereby to form the solid immersion lens portion of the solid immersion lens structure; and

removing the solid immersion lens portion of the solid immersion lens structure from the pliant mold after the moldable material has set.

2. A method according to claim 1, wherein producing the mold comprises forming the mold from a thermally-resilient deformable material.

3. A method for constructing a solid immersion lens structure, the method comprising:

producing a mold so as to define a pliant lens cavity in which a spherical solid immersion lens portion of the solid immersion lens structure is to be formed, the pliant lens cavity having an orifice having a transverse dimension less than a transverse dimension of the lens cavity for the spherical solid immersion lens portion;

wherein the mold producing step comprises casting a first catalyzed crosslinkable liquid around a mold core in the form of a generally spherical element until it is set as the mold, thereafter removing the mold core from the mold after the first catalyzed crosslinkable liquid has set wherein a region of the mold adjacent the orifice is allowed to temporarily deform thereby to permit the spherical element to be removed with minimal damage to the mold;

thereafter casting a second catalyzed crosslinkable liquid into the mold until it has set; and

then

removing the solid immersion lens portion from the mold after the second catalyzed crosslinkable liquid has set wherein the region of the mold adjacent the orifice is allowed to temporarily deform thereby to permit the solid immersion lens portion to be removed.

4. A method for constructing a solid immersion lens structure, the method comprising:

producing a mold so as to define a pliant lens cavity in which a spherical solid immersion lens portion of the solid immersion lens structure is to be formed, the pliant lens cavity having an orifice having a transverse dimension less than a transverse dimension of the lens cavity for the spherical solid immersion lens portion;

wherein the mold producing step comprises casting a first moldable material into a container to form a first layer from which the mold is to be formed and permitting the first layer to set, then positioning the mold core on the first layer, and then casting the first moldable material into the container to at least partially encapsulate the mold core, thereby to form a second layer immediately adjacent the first layer.

5. A method according to claim 4 wherein the generally spherical mold core protrudes from the upper surface of the first layer.

6. A method according to claim 5 further comprising casting a second moldable material from which at least the solid immersion lens portion of the solid immersion lens structure is to be formed into the container to fill not only the lens cavity, but also to form a layer in the container, the layer defining an upper surface above the lens cavity, such that the layer forms a body portion of the solid immersion lens structure when the second moldable material has set, the body portion then being integrally molded together with the solid immersion lens portion.

7. A method according to claim 6 further comprising coating the lens cavity and the upper surface of the mold with a release agent to inhibit adhesion of the solid immersion lens portion and the body portion of the solid immersion lens structure to the mold at the upper surface and in the lens cavity.

8. A method according to claim 6 further comprising forming a channel adjacent the layer defining the upper surface above the lens cavity before the first moldable material has set.

9. A method according to claim 4 wherein the first moldable material from which at least the first layer is formed comprises a silicone elastomer.

10. A method according to claim 9 wherein the second moldable material from which at least the lens portion is formed comprises a silicone elastomer.

11. A method for imaging an object, the method comprising:

guiding the object along a passage defined by an integrally molded together solid immersion lens structure, the solid immersion lens structure defining a body portion, in which the passage is defined, and a solid immersion lens portion, the solid immersion lens portion being optically aligned with a position in the passage;

positioning the object in the passage at the position which is optically aligned with the solid immersion lens portion so that the object is within a field of view extending through the solid immersion lens portion; and

viewing the object in the passage through the solid immersion lens portion while the object is at the position in the passage which is optically aligned with the solid immersion lens portion.

12. A method as claimed in claim 11, wherein the solid immersion lens structure defines an inlet, leading into the passage, and an outlet, leading from the passage, guiding the object along the passage comprising passing the object through the inlet and along the passage.

13. A method as claimed in claim 12, wherein the object is supported in a liquid, passing the object through the inlet and along the passage comprising pumping the liquid along the passage.

14. A method as claimed in any one of claims 13, wherein viewing the object through the solid immersion lens while at the position in the passage which is optically aligned with the solid immersion lens portion comprises optically aligning a microscope with the solid immersion lens portion, and viewing the object through the microscope.