Optical microswitch with rotary electrostatic microactuator
First Claim
1. An optical microswitch for use with a laser beam comprising a support body, first and second output fibers carried by the body, a rotary electrostatic microactuator carried by the body and extending in a plane, a micromirror disposed out of the plane, the microactuator having a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting the laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.
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Accused Products
Abstract
An optical microswitch comprising a support body and first and second output fibers carried by the body. A rotary electrostatic microactuator is carried by the body and extends in plane. A micromirror is disposed out of the plane. The microactuator has a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting a laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.
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Citations
19 Claims
- 1. An optical microswitch for use with a laser beam comprising a support body, first and second output fibers carried by the body, a rotary electrostatic microactuator carried by the body and extending in a plane, a micromirror disposed out of the plane, the microactuator having a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting the laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.
- 15. An optical microswitch for use with a laser beam comprising a support body, first and second output fibers carried by the body, first and second rotary electrostatic microactuators carried by the body, the first microactuator extending in a first plane and the second rotary microactuator extending in a second plane disposed perpendicular to the first plane, each of the first and second microactuators having a micromirror disposed out of the plane of the microactuator and having a mirror holder coupled to the micromirror and first and second comb drive assemblies coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between first and second positions whereby rotation of the micromirror of the first microactuator to the first position and rotation of the micromirror of the second microactuator to the first position reflects the laser beam to the first output fiber and rotation of the micromirror of the first microactuator to the second position and rotation of the micromirror of the second microactuator to the second position reflects the laser beam to the second output fiber.
- 18. An optical microswitch for use with a laser beam comprising a support body, first and second output fibers carried by the body, a rotary electrostatic microactuator having a fanlike shape carried by the body and extending in a plane, a micromachined, planar mirror disposed out of the plane, the microactuator having a mirror holder coupled to the mirror and at least one comb drive assembly coupled to the mirror holder for driving the mirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting the laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.
Specification