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Bi-stable micro switch

  • US 6,303,885 B1
  • Filed: 03/03/2000
  • Issued: 10/16/2001
  • Est. Priority Date: 03/03/2000
  • Status: Expired due to Fees
First Claim
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1. A bi-stable micro-electro-mechanical system (“

  • MEMS”

    ) switch comprising;

    a static portion (24);

    a center body (22) movable with respect to the static portion in response to operation of an actuator (34) coupled to the static portion and to the center body, the center body being further coupled to the static portion with a first pair of spring arms (28, 30) coupled to a hollow beam portion (36) of the center body.

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