Bi-stable micro switch

• US 6,303,885 B1
• Filed: 03/03/2000
• Issued: 10/16/2001
• Est. Priority Date: 03/03/2000
• Status: Expired due to Fees

• Current Assignee: JDS Uniphase Corporation (Lumentum Holdings Inc.)
• Original Assignee: Optical Coating Laboratory, Inc. (Lumentum Holdings Inc.)
• Inventors: Gale, Michael, Marxer, Cornel, Hichwa, Bryant P.
• Primary Examiner(s): Sircus, Brian
• Assistant Examiner(s): Zarroli, Michael C.
• Application Number:
  US09/517,649
• Time in Patent Office: 592 Days
• Field of Search: 310/307, 310/306, 310/309, 310/324, 200/181
• US Class Current: 200/181
• CPC Class Codes: G02B 6/3514 the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

A bi-stable micro-machined electromechanical system (“MEMS”) switch. In a preferred embodiment, the bi-stable MEMS switch is used in an N×N optical signal switching system. Spring arms act in conjunction with a hollow beam portion of a movable center body of the switch to accommodate strain in the arms as the switch is moved from a first position to a second position, thus avoiding buckling of the spring arms. Both the first and second switch position occur at local minimums of mechanical potential energy, thus providing two stable switch states. The center body is moved in relation to static portions of the switch by an actuator, such as an electro-static comb drive.

Claims

1. A bi-stable micro-electro-mechanical system (“

MEMS”

) switch comprising;

a static portion (24);

a center body (22) movable with respect to the static portion in response to operation of

an actuator (34) coupled to the static portion and to the center body, the center body being further coupled to the static portion with

a first pair of spring arms (28, 30) coupled to

a hollow beam portion (36) of the center body.

2. The bi-stable MEMS switch of claim 1 further comprising a second pair of spring arms.

3. The bi-stable MEMS switch of claim 1 wherein at least one of the first pair of spring arms includes a flexible hinge (79).

4. The bi-stable MEMS switch of claim 2 wherein each of the first pair and the second pair of spring arms includes a flexible hinge.

5. The bi-stable MEMS switch of claim 1 wherein the actuator comprises an electro-static comb drive.

6. The bi-stable MEMS switch of claim 1 wherein the center body includes a mounting portion (95) with a mirror coating (126).

7. The bi-stable MEMS switch of claim 6 wherein the mirror coating comprises a sputtered layer of gold having a thickness between about 700-1000 Angstroms.

8. The bi-stable MEMS switch of claim 2 wherein the center body includes a first hollow beam portion (36A) and a second hollow beam portion (36B), the first pair (80, 84) of spring arms being coupled to the first hollow beam portion and the second pair of spring arms being coupled to the second hollow beam portion.

9. A bi-stable micro-electro-mechanical system (“

MEMS”

) switch comprising;

a static portion (24);

a center body (22A) having a first hollow beam portion (36A) and a second hollow beam portion (36B), and a mounting portion (95) with a mirror disposed on at least one vertical surface of the mounting portion, the center body being movable with respect to the static portion in response to operation of

an electrostatic comb drive coupled to the static portion and to the center body, the center body being further coupled to the static portion with

a first pair of spring arms and a second pair of spring arms wherein each of the spring arms includes at least one flexible hinge, and the first pair of spring arms is coupled to the first hollow beam portion and the second pair of spring arms is coupled to the second hollow beam portion.

10. A bi-stable micro-electro-mechanical system (“

MEMS”

) switch comprising;

a static portion;

a center body with a hollow portion, the hollow portion having a first wall and an opposite wall, the center body being coupled to the static portion by

a first spring arm coupled to the first wall and

a second spring arm coupled to the opposite wall, the first spring arm being attached to the first wall essentially opposite to the second spring arm at the opposite wall, the center body being movable with respect to the static portion between a first position and a second position wherein movement of the center body between the first and second position induces strain in the first spring arm and in the second spring arm and corresponding compression of the first wall and the opposite wall to avoid buckling of the first spring arm and the second spring arm.