Absolute position sensing by phase shift detection using a variable capacitor

• US 6,304,091 B1
• Filed: 02/09/1999
• Issued: 10/16/2001
• Est. Priority Date: 02/10/1998
• Status: Expired due to Term

• Current Assignee: Immersion Corporation
• Original Assignee: Immersion Corporation
• Inventors: Schena, Bruce M., Hasser, Christopher J., Shahoian, Erik J.
• Primary Examiner(s): Metjahic, Safet
• Assistant Examiner(s): Deb, Anjan K.
• Application Number:
  US09/248,177
• Time in Patent Office: 980 Days
• Field of Search: 324/662, 324/663, 324/661, 324/658, 324/683, 324/686, 324/660, 340/870.25, 340/870.37, 361/292
• US Class Current: 324/662
• CPC Class Codes: G01D 5/2412 by varying overlap

Abstract

A low-cost, high-resolution capacitive position sensor is provided using a variable capacitor. A vane moves parallel to a stator, where a dielectric is interposed between vane and stator, such that the vane overlaps at least a portion of the stator, creating a capacitance that varies as the vane moves relative to the fixed stator. The capacitor circuit outputs a signal having a phase shift relative to an input driver signal based on the relative positions of the vane and stator. The phase-shifted signal is used to derive the absolute position of the vane with respect to the stator. Two or more stator can be provided to provide two phase-shifted signals and a difference signal free of common mode effects. Enhanced embodiments include interdigitated stator portions for greater sensing resolution, and/or a two or three-pole filter to double or triple the dynamic range of the sensor.

Claims

1. A capacitive position sensor comprising:

a first stator and a second stator, each of said first and second stators coupled to a driver signal input to allow a driver signal to be input to said first and second stators;

a resistor coupled between said driver signal input and said first stator;

a vane, wherein said vane moves parallel to said first stator such that said vane overlaps at least a portion of said first stator, thereby creating a capacitance that varies as said vane moves;

a dielectric provided between said vane and said first stator; and

a circuit coupled to said first stator, said circuit sensing a voltage on said first stator based on relative positions of said first stator and said vane, said circuit providing a phase-shifted signal describing a phase shift of said voltage with reference to said driver signal, said phase shifted signal suitable for deriving an absolute position of said vane with respect to said first stator.

2. A position sensor as recited in claim 1 wherein said phase shift is based on a degree of overlap of said first stator by said vane, thereby indicating a position of said vane relative to said first stator.

3. A position sensor as recited in claim 1 wherein said vane and said first stator are each positioned approximately within a plane, said planes being parallel to each other.

4. A position sensor as recited in claim 1 wherein said first stator and said vane are approximately planar in shape.

5. A position sensor as recited in claim 4 wherein said first stator is provided on a printed circuit board.

6. A position sensor as recited in claim 1 wherein said driver signal is an AC signal provided by an input circuit including an oscillator.

7. A position sensor as recited in claim 1 wherein a user manipulandum is coupled to said vane such that a position of said user manipulandum can be determined based on said position of said vane with respect to said first stator.

8. A position sensor as recited in claim 3 wherein said vane moves within said plane in which said vane is positioned with respect to said first stator.

9. A position sensor as recited in claim 1 wherein said vane moves about an axis in a rotary degree of freedom with respect to said first stator.

10. A position sensor as recited in claim 1 further comprising a circuit that receives said phase-shifted signal and outputs a pulse width modulated signal which is linearly proportional to the position of the vane with respect to the first stator.

11. A position sensor as recited in claim 10 wherein said circuit that receives said phase shifted signal includes an XOR gate.

12. A position sensor as recited in claim 11 further comprising a filter receiving said pulse width modulated signal and producing a filter output signal.

13. A position sensor as recited in claim 1 wherein said second stator is positioned adjacent to said first stator approximately in a same plane as said first stator, wherein said vane moves parallel to said stators and overlaps both of said stators during said movement of said vane.

14. A position sensor as recited in claim 13 wherein said circuit is a first circuit coupled to said stator and said phase-shifted signal is a first phase-shifted signal, and wherein a second circuit is coupled to said second stator to provide a second phase-shifted signal having a phase-shift with reference to said driver signal.

15. A position sensor as recited in claim 14 wherein said second phase-shifted signal increases in amplitude while said first phase-shifted signal decreases in amplitude, and wherein said first and second phase-shifted signals are subtracted to provide a difference signal free of common mode effects.

16. A position sensor as recited in claim 1 further comprising third and fourth stators positioned in a same plane as said first and second stators, and wherein said vane is circular, such that said circuit provides four output signals which are subtracted to provide a two-degree-of-freedom position.

17. A position sensor as recited in claim 1 wherein two portions of said first stator are interdigitated with said second stator such that said two stators are in a range of movement of said vane.

18. A position sensor as recited in claim 1 wherein said first stator, said vane, and said dielectric are provided in a first capacitor, and further comprising a second capacitor, said first and second capacitors providing a multi-pole configuration that increases a dynamic range of said sensor.

19. An interface device including a capacitive position sensor, said interface device being coupled to a host computer and providing input to said host computer based on manipulations of a user of said interface device to manipulate computer-generated objects, said interface device comprising:

(a) a position sensor, including;

(i) a stator coupled to a driver signal input to allow a driver signal to be input to said stator;

(ii) a resistor coupled between said driver signal input and said stator;

(iii) a dielectric provided on one side of said stator;

(iv) a vane positioned such that said dielectric is between said stator and said vane, wherein said vane moves parallel to said stator such that said vane overlaps at least a portion of said stator, thereby creating a capacitance that varies as said vane moves; and

(v) a circuit coupled to said stator, said circuit sensing a voltage on said stator based on relative positions of said stator and said vane, said circuit outputting a signal describing a phase shift of said voltage with reference to said driver signal, wherein an absolute position of said vane with respect to said stator is derivable from said signal describing said phase shift; and

(b) a user manipulandum grasped and moved by a user in a degree of freedom, wherein said user manipulandum is coupled to said vane such that movement of said vane corresponds to movement of said user manipulandum in said degree of freedom.

20. An interface device as recited in claim 19 further comprising a mechanical linkage positioned between said user manipulandum and said vane.

21. An interface device as recited in claim 19 wherein said stator and said vane are each approximately positioned in a plane, said planes parallel to each other, wherein said vane moves within said plane in which it is positioned.

22. An interface device as recited in claim 19 further comprising a circuit that receives said phase-shifted signal and outputs a pulse width modulated signal which is linearly proportional to the position of the vane with respect to the stator.

23. An interface device as recited in claim 19 wherein said stator is a first stator, and further comprising a second stator positioned adjacent to said first stator approximately in a same plane as said first stator, wherein said vane moves parallel to said stators and overlaps both of said stators during said movement of said vane, and wherein said second stator is coupled to said drive signal input to allow said driver signal to be input to said second stator.

24. An interface device as recited in claim 23 wherein said circuit is a first circuit and said signal is a first signal, and wherein a second circuit is coupled to said second stator to provide a second phase-shifted signal having a phase shift with reference to said driver signal.

25. A method for sensing the position of a moving member, the method comprising:

providing an input signal having a frequency;

shifting a phase of said input signal by inputting said input signal to a first RC circuit and to a second RC circuit to provide a first phase-shifted signal and a second phase-shifted signal, said first RC circuit including a resistor and a capacitor coupled in series, wherein said input signal is input to said resistor, and wherein said capacitor of said first RC circuit is a variable capacitor having two plates and having a capacitance based on a position of a first one of said plates with reference to a second one of said plates, wherein said relative positions of said plates are determined based on a position of said moving member; and

providing said first phase-shifted signal to a phase detector circuit, said phase detector circuit having a first input coupled at a node between said resistor and said capacitor to sense a voltage at said node and having a second input that is said input signal, said phase detector circuit outputting a pulse width modulated signal which is linearly proportional to the position of one of said plates with respect to the other of said plates.

26. A method as recited in claim 25 wherein said moving member is coupled to one of said plates and to a user manipulandum that is moved by a user.

27. A method as recited in claim 25 wherein said capacitance is based on an amount of overlap of one of said plates by the other of said plates.

28. A method as recited in claim 25 wherein said plates include a vane and a first stator, wherein said second RC circuit includes a second stator, and further comprising subtracting said first phased-shifted signal and said second phased-shifted signal to provide a difference signal free of common mode effects.

29. A method as recited in claim 25 further comprising measuring said pulse width modulated signal with a microprocessor to resolve a position of said moving member.

30. A method as recited in claim 25 further comprising low-pass filtering said pulse width modulated signal to provide an output voltage signal.

31. A capacitive position sensor comprising:

a fixed conductive plate;

a movable conductive plate coupled to a driver signal input to allow a driver signal to be input to said movable conductive plate, wherein said movable conductive plate moves parallel to said fixed conductive plate such that said movable conductive plate overlaps at least a portion of said fixed conductive plate, thereby creating a capacitance that varies as said movable conductive plate moves;

a resistor coupled between said driver signal input and said movable conductive plate;

a dielectric provided between said movable conductive plate and said fixed conductive plate; and

a circuit coupled to said movable conductive plate, said circuit sensing a voltage on said movable conductive plate based on relative positions of said fixed conductive plate and said movable conductive plate, said circuit providing a phase-shifted signal describing a phase shift of said voltage with reference to said driver signal, said phase shifted signal suitable for deriving an absolute position of said movable conductive plate with respect to said fixed conductive plate.