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Road vibration compensated angular rate sensor

  • US 6,305,222 B1
  • Filed: 05/27/1999
  • Issued: 10/23/2001
  • Est. Priority Date: 05/27/1999
  • Status: Expired due to Term
First Claim
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1. A motion sensor comprising:

  • a sensing ring supported by a substrate;

    a first pair of diametrically opposed drive electrode structures defined on said substrate about said ring and defining a first axis therethrough, said first pair of diametrically opposed drive electrode structures adapted to receive sensor drive signals thereat;

    a first pair of diametrically opposed sense electrode structures defined on said substrate about said ring and defining a second axis therethrough normal to said first axis; and

    a first amplifier having an input coupled to each of said first pair of diametrically opposed sense electrode structures and an output defining a first output of said motion sensor.

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