Acceleration sensor

• US 6,305,223 B1
• Filed: 01/03/1997
• Issued: 10/23/2001
• Est. Priority Date: 12/27/1993
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Matsumoto, Masahiro, Miki, Masayuki, Suzuki, Seikou
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US08/778,538
• Time in Patent Office: 1,754 Days
• Field of Search: 734/93, 734/97, 735/142.1, 735/142.3, 735/143.2, 735/143.6, 280/735, 361/280, 361/283.1, 361/283.3
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: H01L 2224/45144 Gold (Au) as principal constituent
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

An acceleration sensor is disclosed which includes a capacitance-type acceleration detection element mounted on a ceramic base plate. The element comprises a movable electrode mounted between a pair of fixed electrodes. Acceleration of the sensor in a measurement direction causes the movable electrode to move relative to the fixed electrodes and the element has opposite ends in a direction perpendicular to the measurement direction. The acceleration detection element is mounted on the base at a first one of the opposite ends. Accordingly, the mounting surface of the acceleration sensor is parallel to the direction of acceleration to be detected. Thus the acceleration sensor can be surface-mounted on a printed board, and more be easily mounted in an automobile air bag control system or the like.

Claims

1. Electrical apparatus including an acceleration sensor, said acceleration sensor including:

a base; and

an acceleration detection element of capacitance type mounted on said base, said acceleration detection element having a movable electrode of silicon mounted adjacent a fixed electrode such that acceleration of the sensor in a measurement direction causes said movable electrode to move relative to said fixed electrode;

wherein said acceleration detection element is mounted on said base;

said apparatus further including a circuit board and said acceleration sensor being mounted on said circuit board using mounting means, wherein said mounting means also provide electrical connection between said circuit board and said acceleration sensor; and

wherein said acceleration sensor is mounted on said circuit board such that said base is substantially perpendicular to said circuit board.

2. Electrical apparatus including an acceleration sensor, said acceleration sensor including an acceleration detection element mounted on a ceramic base;

said base including an electrical connection part electrically connected to said acceleration detection element;

said acceleration sensor being mounted on a circuit board using a holder, wherein said holder also provides electrical connection between said circuit board and said acceleration sensor;

wherein said acceleration sensor is mounted on said circuit board such that said base is substantially perpendicular to said circuit board.

3. An acceleration sensor comprising:

an acceleration detector;

an electronic circuit generating an electrical signal in accordance with said acceleration detected by said acceleration detector;

a solder pad electrically connected to said electronic circuit and positioned substantially parallel to a detecting direction of said acceleration detector; and

a member provided with said solder pad externally thereof and enclosing said acceleration detector and said electronic circuit.

4. An acceleration sensor according to claim 3, wherein said acceleration detector comprises a weight formed on a silicon plate and a beam for supporting said weight, and said solder pad is substantially perpendicular to said silicon plate.