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Substrate preparation process

  • US 6,307,042 B1
  • Filed: 02/04/1999
  • Issued: 10/23/2001
  • Est. Priority Date: 04/17/1996
  • Status: Expired due to Term
First Claim
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1. A method of forming a plurality of individual polymer arrays, comprising:

  • providing a plurality of substrate wafers, each of said substrate wafers having a first surface, said first surface having functional groups disposed thereon, said functional groups being protected with a removable protecting group;

    exposing a plurality of first known locations on said first surface of each of said substrate wafers to an activator at an activation station to remove said removable protecting groups from said functional groups in said first known locations;

    moving said substrate wafers batch-wise to a coupling station;

    contacting said plurality of wafers with a monomer containing solution at said coupling station, to couple the monomers to said functional groups in said known locations on said surface of said plurality of substrate wafers;

    returning said substrate wafers batch-wise to said activation station;

    repeating said exposing, moving and contacting steps at further known locations on said plurality of substrate wafers to form a plurality of individual polymer arrays on said first surface of each of said substrate wafers.

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