Tuning mechanical resonators for electrical filter

• US 6,307,447 B1
• Filed: 11/01/1999
• Issued: 10/23/2001
• Est. Priority Date: 11/01/1999
• Status: Expired due to Term

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Agere Systems Guardian Corp. (Broadcom, Inc.)
• Inventors: Barber, Bradley Paul, Gammel, Peter L., Wong, Yiu-Huen
• Primary Examiner(s): Pascal, Robert
• Assistant Examiner(s): Summons, Barbara
• Application Number:
  US09/432,040
• Time in Patent Office: 722 Days
• Field of Search: 333/187-192, 333/201, 310/312, 310/364, 29/253.5
• US Class Current: 333/189
• CPC Class Codes: H03H 2003/0428 of an electrode
• CPC Class Codes: H03H 2003/0435 of a piezoelectric layer
• CPC Class Codes: H03H 3/04 for obtaining desired frequency or temperature coefficient
• CPC Class Codes: H03H 9/564 implemented with thin-film techniques
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

The present invention is a method for adjusting different resonant frequencies of a plurality of mechanical resonators formed on a common substrate, in a case where the resonant frequencies of the resonators are a function of each resonator thickness. According to this method the resonators are each formed with an etchable top electrode layer which includes a material having different etching properties as a topmost layer for each of the resonators having different resonant frequencies. By selectively etching these etchable layers one at a time in the presence of the others, one may adjust the resonant frequencies of each of the resonators without need to mask the resonators during the etching process. Associated with this method there is a resonator structure having a top electrode structure having a topmost layer having different etching characteristics for different resonators.

Claims

1. A method for adjusting different resonant frequencies of a plurality of mechanical resonators formed on a common substrate, wherein the resonant frequencies of said resonators are a function of each resonator thickness, the method comprising forming said resonators with an etchable layer comprising a material having different etching properties for each of said resonators having different resonant frequencies and selectively etching said etchable layers to adjust the resonant frequencies of said resonators.

2. A method for adjusting a resonant frequency of at least a first and a second mechanical resonator comprising elements of an electrical filter, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, wherein the resonant frequency of each resonator is a function of an overall resonator thickness, the method comprising:

a) forming the top electrode for each resonator having a top electrode thickness selected such that the resonator thickness is in excess of the required total thickness for each resonator to resonate at a desired frequency, wherein the top electrode of the first resonator comprises a first material and the top electrode for the second resonator comprises a second material, and wherein said first and said second materials have different etching properties;

b) selectively etching said top electrodes of said first and second resonators; and

c) stopping the etching process for each of said first and second resonators when the resonator thickness produces the desired frequency for said resonator.

3. The method according to claim 2 wherein the step of forming said top electrodes further comprises forming the top electrode of the first resonator by first forming a first conductive layer over said transducer and forming a topmost adjustment layer over said first conductive layer, the topmost adjustment layer selected to have different etching properties than a topmost layer of the top electrode of the second resonator.

4. The method according to claim 3 wherein said topmost layer of said first top electrode is SiO₂ and the top electrode of the second resonator is an aluminum layer.

5. The method according to claim 2 wherein one of said top electrodes comprises a gold layer and the other a aluminum layer.

6. The method according to claim 2 wherein the selective etching is done while applying an electrical signal and monitoring each of said resonator frequencies.

7. The method according to claim 6 wherein the etching process comprises reactive ion etching.

8. The method according to claim 6 wherein the etching process comprises vapor phase etching.

9. The method according to claim 6 wherein at least one diagnostic resonator having a resonant frequency same as the resonant frequency of one of said first and second resonators, is built adjacent one of said first and second mechanical resonators comprising the elements of the electrical filter, and wherein the selective etching is done in the presence of said diagnostic resonator while applying an electrical signal and monitoring said diagnostic resonator frequency.

10. The method according to claim 2 wherein the transducer material is selected from the group consisting of piezoelectric, piezomagnetic, electrostrictive and magnetostrictive materials.

11. The method according to claim 2 wherein the bottom electrode is formed as a common electrode to both the first and the second resonators.

12. The method according to claim 2 wherein the selective etching comprises dipping the resonators in an etching solution for a period of time calculated to remove a sufficient amount of top electrode material of at least one of said resonators'"'"' top electrode to produce a desired resonant frequency.

13. An electrical filter comprising at least a first and a second mechanical resonators each having a distinct resonant frequency, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, each of the resonators having a thickness, the resonant frequency of each of said resonators being a function of each resonator thickness, the first of said resonators having its top electrode comprising a material having etching properties different from the top electrode of said second resonator, each of said resonators having been etched to its respective thickness.

14. An electrical filter comprising at least a first and a second mechanical resonators each having a distinct resonant frequency, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, each of the resonators having a thickness, the resonant frequency of each of said resonators being a function of each resonator thickness, the first of said resonators having its top electrode comprising a material having etching properties different from the top electrode of said second resonator, wherein the resonant frequency of said resonators of said filter have been adjusted by a process comprising:

selectively etching said top electrodes of said first and second resonators; and

stopping the etching process for each of said first and second resonators when the frequency is the desired frequency for said resonator.

15. The electrical filter according to claim 14 wherein the top electrode of the first resonator comprises a first conductive electrode layer formed over said transducer and a topmost adjustment layer formed over said first conductive electrode, the topmost adjustment layer having different etching properties than a topmost layer of the second resonator.

16. The electrical filter according to claim 15 wherein said topmost layer of said first top electrode comprises SiO₂ and the top electrode of the second resonator comprises an aluminum layer.