Spatial light modulator with conformal grating device

• US 6,307,663 B1
• Filed: 01/26/2000
• Issued: 10/23/2001
• Est. Priority Date: 01/26/2000
• Status: Expired due to Fees

• Current Assignee: Eastman Kodak Company
• Original Assignee: Eastman Kodak Company
• Inventors: Kowarz, Marek W.
• Primary Examiner(s): Spyrou, Cassandra
• Assistant Examiner(s): Juba, Jr., John
• Application Number:
  US09/491,354
• Time in Patent Office: 636 Days
• Field of Search: 359/572, 359/573, 359/291, 359/292, 359/295, 359/290, 359/223, 359/224, 359/225, 359/900
• US Class Current: 359/231
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements
• CPC Class Codes: G02B 5/1828 having means for producing variable diffraction controlling the direction of light by means of one or more diffracting elements G02B26/0808; acousto-optical elements G02F1/11, G02F1/33; electro- or magneto-optical diffraction G02F1/292, G02F1/2955
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A mechanical grating device for modulating an incident beam of light by diffraction includes an elongated element including a light reflective surface; a pair of end supports for supporting the elongated element at both ends over a substrate; at least one intermediate support between the end supports; and means for applying a force to the elongated element to cause the element to deform between first and second operating states

Claims

1. A mechanical conformal grating device for modulating an incident beam of light by diffraction, comprising:

a) an elongated element including a light reflective surface;

b) a pair of end supports for supporting the elongated element at both ends over a substrate;

c) at least one intermediate support between the end supports; and

d) means for applying a force to the elongated element to cause the element to deform between first and second operating states, wherein the elongated element partially conforms mechanically to the intermediate support in the second operating state to form an optical grating with a diffraction grating period determined by placement of the intermediate support.

2. The mechanical conformal grating device claimed in claim 1, wherein in the first operating state, the elongated element functions as a plane reflector and in the second operating state the elongated element functions as an optical grating with the diffraction grating period parallel to the length of the elongated element.

3. The mechanical conformal grating device claimed in claim 1, wherein the intermediate support contacts the elongated element only when in the second operating state.

4. The mechanical conformal grating device claimed in claim 1, wherein the elongated element is supported under tension.

5. The mechanical conformal grating device claimed in claim 1, further including a standoff located on the substrate under the elongated element to prevent the elongated element from sticking to the substrate when the elongated element is deformed.

6. The mechanical conformal grating device claimed in claim 1, wherein the force is an electrostatic force.

7. The mechanical conformal grating device claimed in claim 6, wherein the elongated element includes a first conductor, and the substrate under the elongated element includes a second conductor for applying a voltage to generate the electrostatic force.

8. A method of operating the mechanical conformal grating device claimed in claim 7, wherein the mechanical conformal grating device exhibits hysteresis, comprising the steps of:

a) applying a voltage across the conductors of the device to switch the device from the first state to the second state; and

b) decreasing the voltage to hold the elongated element in a more optimal second state.

9. The mechanical conformal grating device claimed in claim 1, wherein the elongated element comprises a plurality of parallel spaced apart portions.

10. The mechanical conformal grating device claimed in claim 1, wherein the intermediate support is not visible when viewing the light reflective surface of the elongated element.

11. A mechanical conformal grating device array for spatially modulating an incident beam of light by diffraction, comprising a plurality of mechanical conformal grating devices, each grating device comprising:

a) an elongated element including a light reflective surface;

b) a pair of end supports for supporting the elongated element at both ends over a substrate;

c) at least one intermediate support between the end supports; and

d) means for applying a force to the elongated element to cause the element to deform between first and second operating states, wherein the elongated element partially conforms mechanically to the intermediate support in the second operating state to form an optical grating with a diffraction grating period determined by placement of the intermediate support.

12. The mechanical conformal grating device array claimed in claim 11, wherein in the first operating state, the elongated elements functions as a plane reflector and in the second operating state the elongated element functions as optical grating with the diffraction grating period parallel to the length of the elongated element.

13. The mechanical conformal grating device array claimed in claim 11, wherein the intermediate support contacts the elongated element only when in the second operating state.

14. The mechanical conformal grating device array claimed in claim 11, wherein the elongated element is supported under tension.

15. The mechanical conformal grating device array claimed in claim 11, further including a standoff located on the substrate under the elongated element to prevent the elongated element from sticking to the substrate when the elongated element is deformed.

16. The mechanical conformal grating device array claimed in claim 11, wherein the force is an electrostatic force.

17. The mechanical conformal grating device array claimed in claim 16, wherein the elongated element includes a first conductor, and the substrate under the elongated element includes a second conductor for applying a voltage to generate the electrostatic force.

18. The mechanical conformal grating device array claimed in claim 11, wherein the elongated element comprises a plurality of parallel spaced apart portions.

19. The mechanical conformal grating device array claimed in claim 11, wherein the intermediate supports are not visible when viewing the light reflective surfaces of the elongated elements.

20. The mechanical conformal grating device array claimed in claim 11, wherein the grating devices are arranged in a line such that light is diffracted in a direction perpendicular to the line.

21. The mechanical conformal grating device array claimed in claim 11, wherein the grating devices are arranged in a two dimensional array.

22. A mechanical conformal grating device for modulating an incident beam of light by diffraction, comprising:

a) an elongated element including a light reflective surface;

b) a pair of end supports for supporting the elongated element at both ends over a substrate;

c) at least one intermediate support between the end supports, wherein the elongated element is secured to the intermediate support and the end supports; and

d) means for applying a force to the elongated element to cause the element to deform between first and second operating states, wherein the elongated element partially conforms mechanically to the intermediate support in the second operating state to form an optical grating with a diffraction grating period determined by placement of the intermediate support.

23. The mechanical conformal grating device claimed in claim 22, wherein in the first operating state the elongated element functions as a plane reflector and in the second operating state the elongated element functions as an optical grating with the diffraction grating period parallel to the length of the elongated element.

24. The mechanical conformal grating device claimed in claim 22, wherein in the first operating state the elongated element is suspended flat and in the second operating state the elongated element has a smoothly varying profile with at least two periods.

25. The mechanical conformal grating device claimed in claim 22, wherein the elongated element is supported under tension.

26. The mechanical conformal grating device claimed in claim 22, further including a standoff located on the substrate under the elongated element to prevent the elongated element from sticking to the substrate when the elongated element is deformed.

27. The mechanical conformal grating device claimed in claim 22, wherein the force is an electrostatic force.

28. The mechanical conformal grating device claimed in claim 27, wherein the elongated element includes a first conductor, and the substrate under the elongated element includes a second conductor for applying a voltage to generate the electrostatic force.

29. The mechanical conformal grating device claimed in claim 22, wherein the elongated element comprises a plurality of parallel spaced apart portions.

30. The mechanical conformal grating device claimed in claim 22 wherein the intermediate support is not visible when viewing the light reflective surface of the elongated element.