Realtime decision making system for reduction of time delays in an automated material handling system

• US 6,308,107 B1
• Filed: 08/31/1999
• Issued: 10/23/2001
• Est. Priority Date: 08/31/1999
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Coss, Elfido, Ryan, Patrick J., Conboy, Michael R.
• Primary Examiner(s): Grant, William
• Assistant Examiner(s): Hartman, Jr., Ronald D
• Application Number:
  US09/387,175
• Time in Patent Office: 784 Days
• Field of Search: 700/121, 700/112, 700/113, 700/115, 700/116, 700/97, 700/99, 700/214, 700/228, 414/217, 414/939, 414/940, 414/937
• US Class Current: 700/121
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G05B 2219/31265 Control process by combining history and real time data
• CPC Class Codes: G05B 2219/32243 Rerouting parts
• CPC Class Codes: G05B 2219/32256 Due dates, pieces must be ready, priority of dates, deadline
• CPC Class Codes: G05B 2219/32272 Decision of next visiting machine selection, where job is to go
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G06Q 10/08 Logistics, e.g. warehousing, loading or distribution; Inventory or stock management
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y10S 414/137 including means for charging or discharging wafer cassette
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

A method for pre-positioning routed material in a computer controlled manufacturing arrangement having alternate locations for predetermined ones of a plurality of manufacturing process steps and predetermined types of materials to be routed into alternate locations. The method includes establishing a distribution of events indicative of the alternate locations at which material is processed for a manufacturing process step with respect to the materials to be routed and documenting the distribution of events in a database with respect to the type of materials to be routed and the alternate locations in terms of routing times, therein establishing a historical routing time for the type of material to be routed. In addition, there is established the actual mix of materials to be routed to the alternate locations and their historical routing time and actual routing time for the type of routed material are compared. Further, one of a plurality of substates is selected that include: pre-position routed material when historical and actual times are substantially the same, hold routed material when the times are different and re-route material when time comparison is not available. Finally, one of a plurality of alternate locations is selected to which to route the material for the next manufacturing process step as a function of a one of the substates.

Claims

1. A method for routing objects in a computer controlled manufacturing arrangement having alternate locations for predetermined ones of a plurality of manufacturing process steps and predetermined types of objects to be routed into alternate locations, comprising the steps of:

establishing a distribution of events indicative of the alternate locations at which object is processed for a manufacturing process step with respect to the objects to be routed;

documenting the distribution of events in a database with respect to the type of objects to be routed and the alternate locations in terms of routing times, therein establishing a historical routing time for the type of object to be routed;

establishing an actual mix of objects to be routed to the alternate locations;

comparing historical routing time with an actual routing time for the routed object;

selecting one of a plurality of substates that include;

pre-position routed object when historical and actual times are substantially the same, hold routed object when the times are different and re-route object when comparison is not available; and

selecting one of a plurality of alternate locations to which to route the object for the next manufacturing process step as a result of one of the substates selected.

2. The method of claim 1, further comprising the step of selecting another one of the plurality of alternate locations to which to pre-position the object for the next manufacturing process step if the one alternate location is unavailable.

3. The method of claim 1, wherein the types of objects is a combination of the following:

semiconductor material and cassettes.

4. The method of claim 1, wherein the method further includes, after establishing the mix step, receiving a trigger signal advising of one of the selected conditions:

an event change in the manufacturing process or a process timer countdown.

5. The method of claim 4, further including defining a threshold probability level as a function of the plurality of manufacturing processes;

and determining a probability as a function of the established distribution of events and the plurality of manufacturing processes.

6. An apparatus for routing objects in a computer controlled manufacturing arrangement having alternate locations for predetermined ones of a plurality of manufacturing process steps and predetermined types of objects to be routed into alternate locations, comprising:

means for establishing a distribution of events indicative of the alternate locations at which object is processed for a manufacturing process step with respect to the objects to be routed;

means for documenting the distribution of events in a database with respect to the type of objects to be routed and the alternate locations in terms of routing times, therein establishing a historical routing time for the type of object to be routed;

means for establishing an actual mix of objects to be routed to the alternate locations;

means for comparing historical routing time with actual routing time for a type of routed object;

means for selecting one of a plurality of substates that include;

preposition routed object when historical and actual times are substantially the same, hold routed object when the times are different and re-route object when comparison is not available; and

means for selecting one of a plurality of alternate locations to which to route the object for the next manufacturing process step as a result of a one of the substates selected.

7. The apparatus of claim 6, further comprising means for selecting another one of the plurality of alternate locations to which to route the object for the next manufacturing process step if the one alternate location is unavailable.

8. The apparatus of claim 6, wherein the types of objects is a combination of the following:

semiconductor material and cassettes.

9. The apparatus of claim 6, wherein the apparatus further includes means for receiving a trigger signal advising of one of the selected conditions:

an event change in the manufacturing process or a process timer countdown.

10. The apparatus of claim 6, wherein the apparatus further includes means for defining a threshold probability level as a function of the plurality of manufacturing processes;

and means for determining a probability as a function of the established distribution of events and the plurality of manufacturing processes.

11. An automated manufacturing arrangement for routing objects between locations in a factory floor, comprising:

an object movement mechanism;

a plurality of stockers coupled to a rail and arranged to transfer objects to and from the rail, each stocker providing temporary storage of an object for a manufacturing process step at a respective location, and at least one manufacturing processing step is performed at alternate locations; and

a data processing system coupled to the stockers and configured and arranged to record a distribution of events in a database with respect to the type of objects to be routed and the alternate locations in terms of routing times, therein establishing a historical routing time for the type of object to be routed, and to compare historical routing time with actual routing time for a type of routed object and to select one of a plurality of substates that include;

pre-position routed object when historical and actual times are substantially the same, hold routed object when the times are different and re-route object when comparison is not available and to select one of a plurality of alternate locations to which to route the object for the next manufacturing process step as a result of a one of the substates selected.