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Angular velocity sensor

  • US 6,308,568 B1
  • Filed: 09/30/1999
  • Issued: 10/30/2001
  • Est. Priority Date: 10/01/1998
  • Status: Expired due to Term
First Claim
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1. An angular velocity sensor, comprising a framelike vibrator supported on a support portion via a pair of T-shaped beams, said support portion being disposed in the center of said framelike vibrator and being formed on a support substrate made of a material having a different coefficient of thermal expansion than said support portion, said T-shaped beams including a first beam portion structured and arranged for displacing said framelike vibrator in a first driving direction, and a second beam portion structured and arranged for displacing said framelike vibrator in a second direction orthogonal to said first direction in response to a Coriolis force when said support portion is rotated about an axis extending in a third direction orthogonal to said first and said second directions.

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