Angular velocity sensor
First Claim
1. An angular velocity sensor, comprising a framelike vibrator supported on a support portion via a pair of T-shaped beams, said support portion being disposed in the center of said framelike vibrator and being formed on a support substrate made of a material having a different coefficient of thermal expansion than said support portion, said T-shaped beams including a first beam portion structured and arranged for displacing said framelike vibrator in a first driving direction, and a second beam portion structured and arranged for displacing said framelike vibrator in a second direction orthogonal to said first direction in response to a Coriolis force when said support portion is rotated about an axis extending in a third direction orthogonal to said first and said second directions.
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Accused Products
Abstract
An angular velocity sensor including a framelike vibrator supported on a fixed support portion via a pair of beams. The framelike vibrator is placed into an inertial state by being vibrated by a driving means, and a displacement of the framelike vibrator due to Coriolis force is detected. The fixed support portion is formed on a support substrate made of a material having a different coefficient of thermal expansion in the center of the framelike vibrator, and the beams are T-shaped and include a first beam portion for displacing the framelike vibrator by the driving means in the driving direction, and a second beam portion for displacing the framelike vibrator in the direction of generation of the Coriolis force.
20 Citations
18 Claims
- 1. An angular velocity sensor, comprising a framelike vibrator supported on a support portion via a pair of T-shaped beams, said support portion being disposed in the center of said framelike vibrator and being formed on a support substrate made of a material having a different coefficient of thermal expansion than said support portion, said T-shaped beams including a first beam portion structured and arranged for displacing said framelike vibrator in a first driving direction, and a second beam portion structured and arranged for displacing said framelike vibrator in a second direction orthogonal to said first direction in response to a Coriolis force when said support portion is rotated about an axis extending in a third direction orthogonal to said first and said second directions.
- 10. An angular velocity sensor, comprising an inner framelike vibrator supported on a support portion via a pair of inner beams, an outer framelike vibrator supported outside said inner framelike vibrator via at least a pair of outer beams, said support portion being disposed in the center of said inner framelike vibrator and being formed on a support substrate made of a material having a different coefficient of thermal expansion in the center of said inner framelike vibrator than said support portion, said inner beams being structured and arranged to displace said inner framelike vibrator and said outer framelike vibrator in a first driving direction, and said outer beams being structured and arranged to displace said outer framelike vibrator in a second direction orthogonal to said first direction in response to a Coriolis force when said support portion is rotated about an axis extending in a third direction orthogonal to said first and said second directions.
Specification