3-Dimensional comb structure and actuator and inertia detection sensor both using the comb structure

• US 6,308,573 B1
• Filed: 01/10/2000
• Issued: 10/30/2001
• Est. Priority Date: 01/11/1999
• Status: Expired due to Term

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Kang, Sung-gyu, Kim, Kyu-yong, Jeong, Hee-moon, Choi, Jae-joon, Lee, Ki Bang
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): MILLER, ROSE MARY
• Application Number:
  US09/479,892
• Time in Patent Office: 659 Days
• Field of Search: 73/504.02, 73/504.04, 73/504.03, 73/504.12, 73/504.08, 73/504.14, 73/504.15, 73/504.16, 73/514.01, 73/105, 73/652, 73/654 , 73/662, 310/308, 310/309, 360/294.2
• US Class Current: 73/652
• CPC Class Codes: B81B 2201/025 Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
• CPC Class Codes: B81B 2203/0136 Comb structures
• CPC Class Codes: B81B 3/0094 Constitution or structural means for improving or controlling physical properties not provided for in B81B3/0067 - B81B3/0091
• CPC Class Codes: G01C 19/5755 the devices having a single sensing mass
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

A 3-dimensional comb structure using an electrical force, and an inertial detection sensor and an actuator both using the 3-dimensional comb structure are provided. In the 3-dimensional comb structure, a suspension structure, which is an inertia body, is separated a predetermined height from a substrate, maintaining the predetermined height from the substrate. A movable comb, which has at least one movable comb finger, protrudes perpendicularly from the suspension structure. A fixed comb, which has at least one fixed comb finger, protrudes perpendicularly from the substrate, in mesh with the movable comb. The 3-dimensional comb structure is driven by a voltage provided from a power supply unit which is connected to the movable comb and the fixed comb.

Claims

1. A 3-dimensional comb structure comprising:

a substrate;

a suspension structure separated a predetermined height from the substrate, maintaining the predetermined height therefrom, such that the suspension structure can vibrate over the substrate;

at least one elastic member connected to the suspension structure, for supporting the suspension structure so that the suspension structure makes an inertial movement;

a movable comb having at least one comb finger, the movable comb protruding from the suspension structure; and

a fixed comb having at least one comb finger, the fixed comb fingers protruding from the substrate opposite to and in mesh with the movable comb fingers.

2. The 3-dimensional comb structure of claim 1, wherein an electrostatic force is generated perpendicular to the direction of protrusion of the movable comb fingers from the suspension structure, when a voltage is applied to the movable comb and the fixed comb, so that the 3-dimensional comb structure is excited parallel to the substrate.

3. The 3-dimensional comb structure of claim 1, wherein the movable comb is meshed with the fixed comb having a predetermined gap between a finger of the movable comb and a finger of the fixed comb.

4. The 3-dimensional comb structure of claim 1, wherein the suspension structure and the movable comb are incorporated into a single body, and make horizontal vibration with respect to the substrate.

5. The 3-dimensional comb structure of claim 1, wherein the movable comb and the fixed comb face each other, and are arranged on the suspension structure and the substrate, respectively, in a circular symmetrical manner, such that the suspension structure is horizontal to the substrate and rotates around the center of the circular symmetry.

6. The 3-dimensional comb structure of claim 1, wherein the movable comb protrudes perpendicularly from the suspension structure, and the fixed comb protrudes perpendicularly from the substrate.

7. The 3-dimensional comb structure of claim 1, wherein the interval between the movable comb and the fixed comb is constant.

8. The 3-dimensional comb structure of claim 1, wherein an electrostatic force, which is generated according to a change in the relative distance between the movable comb and the fixed comb, is constant when a constant voltage is applied between the movable comb and the fixed comb.

9. An inertia detection sensor adopting a 3-dimensional comb structure comprising:

a substrate;

a suspension structure separated a predetermined height from the substrate, maintaining the predetermined height therefrom, such that the suspension structure can vibrate over the substrate;

at least one elastic member connected to the suspension structure, for supporting the suspension structure so that the suspension structure makes an inertial movement;

a movable comb having at least one comb finger, the movable comb protruding from the suspension structure;

a fixed comb having at least one comb finger, the fixed comb fingers protruding from the substrate opposite to and in mesh with the movable comb fingers; and

a sensing unit for detecting an acceleration by sensing a capacity change between the movable comb and the fixed comb.

10. The inertia detection sensor adopting a 3-dimensional comb structure of claim 9, wherein an electrostatic force is generated perpendicular to the direction of protrusion of the movable comb fingers from the suspension structure, when a voltage is applied to the movable comb and the fixed comb, so that the 3-dimensional comb structure is excited parallel to the substrate.

11. The inertial detection sensor adopting a 3-dimensional comb structure of claim 9, wherein the movable comb is meshed with the fixed comb having a predetermined gap between a finger of the movable comb and a finger of the fixed comb.

12. The inertial detection sensor adopting a 3-dimensional comb structure of claim 9, wherein the suspension structure and the movable comb are incorporated into a single body, and make horizontal vibration with respect to the substrate.

13. The inertial detection sensor adopting a 3-dimensional comb structure of claim 9, wherein the movable comb and the fixed comb face each other, and are arranged on the suspension structure and the substrate, respectively, in a circular symmetrical manner, such that the suspension structure is horizontal to the substrate and rotates around the center of the circular symmetry.

14. The inertial detection sensor adopting a 3-dimensional comb structure of claim 9, wherein the movable comb protrudes perpendicularly from the suspension structure, and the fixed comb protrudes perpendicularly from the substrate.

15. The inertial detection sensor adopting a 3-dimensional comb structure of claim 9, wherein the interval between the movable comb and the fixed comb is constant.

16. The inertial detection sensor adopting a 3-dimensional comb structure of claim 9, wherein an electrostatic force, which is generated according to a change in the relative distance between the movable comb and the fixed comb, is constant when a constant voltage is applied between the movable comb and the fixed comb.

17. An actuator adopting a 3-dimensional comb structure comprising:

a substrate;

a suspension structure separated a predetermined height from the substrate, maintaining the predetermined height therefrom, such that the suspension structure can vibrate over the substrate;

at least one elastic member connected to the suspension structure, for supporting the suspension structure so that the suspension structure makes an inertial movement;

a movable comb having at least one comb finger, the movable comb protruding from the suspension structure;

a fixed comb having at least one comb finger, the fixed comb fingers protruding from the substrate opposite to and in mesh with the movable comb fingers; and

a power supply for providing a voltage between the movable comb and the fixed comb to excite the suspension structure.

18. The actuator adopting a 3-dimensional comb structure of claim 17, wherein an electrostatic force is generated perpendicular to the direction of protrusion of the movable comb fingers from the suspension structure, when a voltage is applied to the movable comb and the fixed comb, so that the 3-dimensional comb structure is excited perpendicular to the direction of protrusion of the fixed comb.

19. The actuator adopting a 3-dimensional comb structure of claim 17, wherein the movable comb is meshed with the fixed comb having a predetermined gap between a finger of the movable comb and a finger of the fixed comb.

20. The actuator adopting a 3-dimensional comb structure of claim 17, wherein the movable comb and the fixed comb are arranged in a circular symmetrical manner to face each other, such that the suspension structure rotates around the center of the circular symmetry.

21. The actuator adopting a 3-dimensional comb structure of claim 17, wherein the movable comb protrudes perpendicularly from the suspension structure, and the fixed comb protrudes from the substrate in parallel to the movable comb.

22. The actuator adopting a 3-dimensional comb structure of claim 17, wherein the interval between the movable comb and the fixed comb is constant.

23. The actuator adopting a 3-dimensional comb structure of claim 17, wherein an electrostatic force, which is generated according to a change in the relative distance between the movable comb and the fixed comb, is constant when a constant voltage is applied between the movable comb and the fixed comb.