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Flow measurement and control

  • US 6,308,694 B1
  • Filed: 01/11/1999
  • Issued: 10/30/2001
  • Est. Priority Date: 01/11/1999
  • Status: Expired due to Term
First Claim
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1. An article of manufacture comprising:

  • a housing;

    a flow control valve contained in said housing, said flow control valve having a variable area orifice disposed within a gas flow passage and connected to an inlet portion of said passage;

    a fixed area orifice disposed within said passage and connected to an outlet portion of said passage;

    a first differential pressure sensor coupled across said fixed area orifice to measure a differential pressure across said fixed area orifice;

    a second pressure sensor coupled to said outlet portion to measure outlet pressure; and

    a circuit for producing a signal representative of a square root of a product of said differential pressure and said outlet pressure based on said first sensor and said second sensor.

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