Drafting apparatus

• US 6,308,738 B1
• Filed: 11/30/1999
• Issued: 10/30/2001
• Est. Priority Date: 12/08/1998
• Status: Expired due to Term

• Current Assignee: United Microelectronics Corporation
• Original Assignee: United Microelectronics Corporation
• Inventors: Chen, Tony, Chu, Eric, Liu, Tien-Jui
• Primary Examiner(s): Hepperle, Stephen M.
• Application Number:
  US09/451,285
• Time in Patent Office: 700 Days
• Field of Search: 137/896, 137/599.03, 126/253, 431/170
• US Class Current: 137/599.03
• CPC Class Codes: C23C 16/45591 Fixed means, e.g. wings, baffles
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: C30B 31/16 Feed and outlet means for the gases; Modifying the flow of the gases
• CPC Class Codes: Y10S 438/935 Gas flow control
• CPC Class Codes: Y10T 137/87281 System having plural inlets

Abstract

A drafting apparatus in a furnace. A buffer board having a plurality of gas intakes is disposed in a front end of the drafting apparatus. A laminar flow board having a plurality of gas outtakes is disposed in a rear end of the drafting apparatus. A drafting region is enclosed by the drafting apparatus. The drafting region comprises at least one drafting board to draft and redirect the gas flow. A laminar flow is then obtained to flow through the outtakes on the laminar board.

Claims

1. A drafting apparatus, comprising:

a buffer board, having a plurality of gas intakes disposed in a front end of the drafting apparatus;

a laminar flow board, having a plurality of gas outtakes disposed in a rear end of the drafting apparatus;

a drafting region, enclosed by the drafting apparatus; and

a drafting board disposed within the drafting region and having at least two members, the at least two members being both laterally and longitudinally offset from each other so that a principal gas flow is channeled through the drafting region in a substantially serpentine fashion.

3. The drafting apparatus of claim 1, wherein the laminar flow board is in a flat shape.

2. A drafting apparatus, comprising:

a buffer board, having a plurality of gas intakes dispose in a front end of the drafting apparatus, wherein the buffer board is in a curved shape

a laminar flow board, having a plurality of gas outtakes dispose in a rear end of the drafting apparatus;

a drafting region, enclosed by the drafting apparatus; and

at least one drafting board, located in the drafting region.