Isolation valves

• US 6,308,932 B1
• Filed: 02/22/2000
• Issued: 10/30/2001
• Est. Priority Date: 05/20/1998
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Komatsu Technology, Inc. (Applied Materials Incorporated)
• Inventors: White, John M., Ettinger, Gary C.
• Primary Examiner(s): Shaver, Kevin
• Assistant Examiner(s): KEASEL, ERIC S
• Application Number:
  US09/510,724
• Time in Patent Office: 616 Days
• Field of Search: 251/158, 251/167, 251/175, 251/187, 251/189, 251/193, 251/195, 251/197
• US Class Current: 251/167
• CPC Class Codes: F16K 3/188 by means of hydraulic forces

Abstract

Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a gate, located in the housing, and displaceable between a stowed position and a deployed position. When the gate is in the stowed position, communication is permitted between the first and second regions. When the gate is in the deployed position, the gate spans the channel and can be controlled to isolate the first and second regions. The valves can be used, for example, in connection with systems for processing large glass substrates. The valves are particularly useful for isolating long rectangular openings, such as the openings in substrate processing chambers. Isolating processing chambers or load lock chambers from one another, for example, in a linear system, is facilitated.

Claims

1. An isolation valve comprising:

a housing defining a channel between a first port and a second port; and

a gate disposed within the housing and displaceable between a stowed position in which communication is permitted between the first port and the second port, and a deployed position in which the gate separates the first port from the second port, the gate including;

(a) a first sealing member and a second sealing member;

(b) a first post and a first centering block coupled to the first post, and a second post and a second centering block coupled to the second post, the first and second centering blocks being disposed between the first sealing member and the second sealing member;

(c) at least one spring biasing the first sealing member and the second sealing member toward the first and second centering blocks;

(d) an actuator that selectively moves the gate between the stowed and deployed positions;

(e) a frame that couples the actuator to the gate, the frame comprising a transverse cross-member coupled to the actuator and having first and second ends, wherein the first and second posts are coupled to the first and second ends of the cross-member, respectively; and

(f) an expandable member disposed between the first and second centering blocks and the first sealing member and the second sealing member, the expandable member being expandable from a first condition, wherein the gate is moveable between the stowed and deployed positions, to a second condition, wherein the gate is in the deployed position and the first sealing member and the second sealing member are biased apart from each other by expansion of the expandable member so that the first sealing member is sealingly engaged to the first port.

2. The valve of claim 1, wherein the second sealing member is sealingly engaged to the second port in the second condition.

3. The valve of claim 1, wherein the first sealing member and the second sealing member are substantially aligned parallel to each other.

4. The valve of claim 1, wherein the expandable member comprises a bellows.

5. The valve of claim 1, wherein the first sealing member comprises a first gasket and the second sealing member comprises a second gasket.

6. The valve of claim 1, wherein fluid communication is blocked between the first port and the channel in the second condition.

7. The valve of claim 1, wherein the gate blocks fluid communication between the first and second ports in the second condition.

8. The valve of claim 1, wherein the first port and the second port each comprise an opening of about 50 inches wide and between about 5 and about 6 inches high.

9. The valve of claim 1, wherein each of the first sealing member and the second sealing member comprises a substantially flat plate.

10. The valve of claim 9, wherein the substantially flat plate has a width of about 51 inches wide and a height between about 6 and about 7 inches.

11. The valve of claim 1, wherein the expandable member comprises an inflatable member.

12. The valve of claim 11, wherein the expandable member comprises an elastomeric bladder.

13. The valve of claim 1, wherein a plurality of springs bias the first sealing member and the second sealing member toward the first and second centering blocks.

14. The valve of claim 13, further comprising at least one pair of springs, wherein a first spring in the pair couples the first sealing member to a centering mechanism, and a second spring in the pair couples the second sealing member to the centering mechanism.

15. The valve of claim 1, wherein the housing further comprises a conduit operatively coupled to a fluid source to allow pressurization and depressurization of the housing.

16. The valve of claim 15, wherein the housing is vented to ambient pressure.

17. The valve of claim 1, further comprising first and second flexures, each flexure having an upper edge and a lower edge, wherein the lower edge of the first flexure is secured to the cross-member and the upper edge of the first flexure is secured to the first sealing member, and wherein the lower edge of the second flexure is secured to the cross-member and the upper edge of the second flexure is secured to the second sealing member.

18. The valve of claim 17, further comprising a first conduit for inflating the expandable member, the first conduit being disposed between the first and second flexures.

19. The valve of claim 18, further comprising a second conduit disposed between the first and second flexures for deflating the expandable member.