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Micropump with a built-in intermediate part

  • US 6,309,189 B1
  • Filed: 06/28/1999
  • Issued: 10/30/2001
  • Est. Priority Date: 12/31/1996
  • Status: Expired due to Term
First Claim
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1. A micropump for pumping and delivering a fluid, said micropump comprising at least one inlet, at least one outlet, one base plate, one upper plate having an initial thickness and provided with a first free face, an intermediate plate interposed between said base plate and said upper plate, and a pumping chamber between said base plate and said intermediate plate, said intermediate plate being made of a machinable material, said micropump further comprising at least one fluid inlet control member for connecting said pumping chamber with said inlet of the micropump, and at least one fluid outlet control member for connecting the pumping chamber with said outlet of the micropump, said intermediate plate comprising a movable wall machined in said intermediate plate in face of said pumping chamber and between said one fluid outlet control member and said one fluid outlet control member, said movable wall being adapted to move in two opposite directions during suction or delivery of said fluid in the pumping chamber, the upper plate being provided with one annular through hole facing at least one portion of said movable wall and an intermediate, said intermediate part and said upper plate being formed as one piece and being surrounded by said annular through hole, said micropump further comprising actuation means fixed on said first free face of said upper plate in face of said pumping chamber and being able to displace said movable wall in order to bring about a periodic variation of the volume of said pumping chamber, wherein the actuation means consists essentially of a single actuating plate, a single piezoelectric actuation device surmounting said actuating plate and said intermediate part, said actuating plate having an initial thickness, being made of a machinable material and being fixed to said first free face of said upper plate, said actuating place having a movable area defining with said upper plate an annular cavity and a central portion having said initial thickness of said actuating plate, said central portion of said actuating plate being surrounded by said annular cavity, said intermediate part facing and being fixed to said central portion of said actuating plate, said intermediate part having said initial thickness of said upper plate and being able to be in contact with said movable wall.

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