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Double-throw miniature electromagnetic microwave (MEM) switches

  • US 6,310,526 B1
  • Filed: 09/21/1999
  • Issued: 10/30/2001
  • Est. Priority Date: 09/21/1999
  • Status: Expired due to Term
First Claim
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1. A miniature double-throw electromagnetic microwave switch comprising;

  • a first dielectric substrate having at least one input transmission line, a first output transmission line and a second output transmission line deposited on a front surface of said first dielectric substrate for propagating and routing of microwave signals;

    a first cantilever connected to said input transmission line and with projection overlapping at least a part of said first output transmission line;

    a second cantilever connected to said second output transmission line and with projection overlapping at least a part of said first cantilever;

    a permanent magnetic film deposited on a part of a top surface of said first cantilever for actuating said first cantilever;

    a conducting ground layer deposited on a back surface of said dielectric substrate;

    a dielectric film coated on part of said conducting ground layer; and

    a thin film electromagnetic coil on said dielectric film for actuating said first cantilever, center of said thin film electromagnetic coil substantially coincides with center of said magnetic film.

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