Process and system for separation and recovery of perfluorocompound gases
First Claim
1. A process for the separation of perfluorocompound gases from a gas mixture, said process comprising the step of:
- contacting a gas mixture comprising at least one carrier gas and at least one perfluorocompound gas selected from the group consisting of CF4, C2F6, C3F8, C4F10, and NF3 with a membrane which permeates said at least one carrier gas faster than said at least one perfluorocompound gas.
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Accused Products
Abstract
Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least one glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.
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Citations
8 Claims
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1. A process for the separation of perfluorocompound gases from a gas mixture, said process comprising the step of:
contacting a gas mixture comprising at least one carrier gas and at least one perfluorocompound gas selected from the group consisting of CF4, C2F6, C3F8, C4F10, and NF3 with a membrane which permeates said at least one carrier gas faster than said at least one perfluorocompound gas. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
Specification