Glassmastering photoresist read after write method and system

• US 6,313,453 B1
• Filed: 10/29/1999
• Issued: 11/06/2001
• Est. Priority Date: 05/12/1998
• Status: Expired due to Term

• Current Assignee: Sony Corporation (Sony Group Corp.), Sony Electronics Inc. (Sony Group Corp.)
• Original Assignee: Sony Corporation (Sony Group Corp.), Sony Electronics Inc. (Sony Group Corp.)
• Inventors: Morton, Edward W.
• Primary Examiner(s): LE, QUE TAN
• Application Number:
  US09/430,127
• Time in Patent Office: 739 Days
• Field of Search: 250/201.5, 250/568, 250/559.11, 250/559.4, 250/238, 369/44.31, 369/44.38, 369/44.14, 369/120, 369/112, 369/53-2-, 356/305, 356/225
• US Class Current: 250/201.5
• CPC Class Codes: G03F 7/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor using photoresist structures for special production processes, see the relevant places, e.g. B44C, H01L, e.g. H01L21/00, H05K
• CPC Class Codes: G03F 7/30 Imagewise removal using liquid means
• CPC Class Codes: G11B 7/261 Preparing a master, e.g. exposing photoresist, electroforming
• CPC Class Codes: Y10S 430/146 Laser beam

Abstract

A method of manufacturing an optical disc master from a glass substrate includes coating the substrate with a layer of photoresist, and applying an alkali-gel layer atop the photoresist. The coated substrate is then placed in an environment with a higher than normal humidity. The surface of the coated glass is selectively exposed to a beam of a writing laser, the exposure being controlled by digital information to be recorded on the disc. Exposed portions of the coated substrate experience a chemical reaction between the photoresist and the alkali material in the humid environment. Exposed portions are then developed and ablated thereby creating the pits and lands.

Claims

1. A system for recording information in a read-after-write process of making optical discs, said system comprising:

a recording chamber for containing a glassmaster

a first light source for generating a writing light beam;

a second light source for generating a reading light beam for reading data written on said glassmaster by said writing light beam;

a photodetection system for detecting diffraction in said reading light beam caused by passing said reading light beam through said glass master; and

a humidifier for controlling humidity in said recording chamber.

2. The system according to claim 1, further comprising an acousto-optical modulator which controls said first light source and writing light beam in response to a data stream which is being written by said writing light beam.

3. The system according to claim 1, wherein said first light source produces said writing light beam with a wavelength between about 351 nm and about 458 nm.

4. The system according to claim 1, wherein said photodetection system comprises first and second photodetectors, said first photodetector having an optical axis parallel to said writing light beam and said second photodetector having an optical axis angled with respect to said optical axis of said first photodetector.

5. The system according to claim 4, wherein said optical axis of said second photodetector is angled 23°

with respect to the optical axis of said first photodetector.

6. The system according to claim 1, wherein said second light source produces said reading light beam with a wavelength of about 635 nm.

7. The system according to claim 1, wherein said first light source is a blue argon-ion laser.

8. The system according to claim 1, wherein said second light source is a red HeNe laser.

9. The system according to claim 1, further comprising a wet vacuum for ablating developed portions of a coating of said glass master.