Coil mounting and cooling system for an electric motor

• US 6,313,550 B1
• Filed: 02/02/2000
• Issued: 11/06/2001
• Est. Priority Date: 02/02/2000
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hazelton, Andrew J., Binnard, Mike
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): JONES, JUDSON
• Application Number:
  US09/496,839
• Time in Patent Office: 643 Days
• Field of Search: 310/12, 310/42, 310/194, 310/98, 310/60.A, 336/208
• US Class Current: 310/12.29
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: H02K 9/197 in which the rotor or stator space is fluid-tight, e.g. to provide for different cooling media for rotor and stator

Abstract

A coil assembly (14) used with a magnet assembly (12) for a linear or planar electric motor (10) is provided herein. The coil assembly (14) includes a plurality of coils (18) attached to a coil base (16) with a plurality of coil supports (22). The coil supports (22) secure the coils (18) to the coil base (16) with the coils (18) spaced apart from a first surface (23) of the coil base (16). As a result thereof, both sides (32), (34) of each coil (18) are exposed for cooling. Further, the coil supports (22) allow the coils (18) to expand laterally with minimal stress and thermal deformation. The coil assembly (14) can also include a plurality of spaced apart covers (62). Each cover (62) fits over one of the coils (18) and is secured to the coil base (16). A fluid (24) can be directed into a fluid passageway (58) around each coil (18) to cool each coil (18).

Claims

1. A coil assembly for use with an electric motor, the coil assembly comprising:

a coil base;

a first coil;

a first cover that cooperates with the coil base to encircle the first coil; and

a first coil support that secures the first coil to the coil base, the first coil support cantilevering away from the coil base towards the first cover and being spaced apart from the first cover.

2. The coil assembly of claim 1 further comprising a second coil and a second cover that cooperates with the coil base to encircle the second coil;

wherein the first cover cooperates with the coil base to provide a first fluid passageway around the first coil and the second cover cooperates with the coil base to provide a second fluid passageway around the second coil.

3. The coil assembly of claim 1 wherein the first coil support engages the first coil approximately at an inner perimeter of the first coil.

4. The coil assembly of claim 1 wherein the first coil support includes a fluid aperture that extends through a portion of the first coil support and allows for the flow of a fluid through the first coil support.

5. An electric motor including a magnet assembly and the coil assembly of claim 1.

6. The electric motor of claim 5 including a fluid source that directs fluid around the first coil to maintain an external surface of the coil assembly at a predetermined temperature.

7. An exposure apparatus including a first stage, a second stage and the motor of claim 5 coupled to one of the stages, the electric motor being adapted to move one of the stages relative to the other one of the stages.

8. An object on which an image has been formed by the exposure apparatus of claim 7.

9. A coil assembly for use with an electric motor, the coil assembly comprising:

a coil base;

a first coil;

a first cover that cooperates with the coil base to encircle the first coil; and

a first coil support that secures the first coil to the coil base, the first coil support including a fluid aperture that extends through a portion of the first coil support and allows for the flow of a fluid through the first coil support.

10. The coil assembly of claim 9 further comprising a second coil and a second cover that cooperates with the coil base to encircle the second coil;

wherein the first cover cooperates with the coil base to provide a first fluid passageway around the first coil and the second cover cooperates with the coil base to provide a second fluid passageway around the second coil.

11. The coil assembly of claim 9 wherein the first coil support engages the first coil approximately at an inner perimeter of the first coil.

12. The coil assembly of claim 9 wherein the first coil support cantilevers away from the coil base towards the first cover and is spaced apart from the first cover.

13. An electric motor including a magnet assembly and the coil assembly of claim 9.

14. The electric motor of claim 13 including a fluid source that directs fluid around the first coil to maintain an external surface of the coil assembly at a predetermined temperature.

15. An exposure apparatus including a first stage, a second stage and the motor of claim 13 coupled to one of the stages, the electric motor being adapted to move one of the stages relative to the other one of the stages.

16. An object on which an image has been formed by the exposure apparatus of claim 15.

17. A method for manufacturing a coil assembly for an electric motor, the method comprising the steps of:

providing a coil base;

providing a first coil;

encircling the first coil with a first cover; and

securing the first coil to the coil base with a first coil support, the first coil support cantilevering away from the coil base towards the first cover, the first coil support being spaced apart from the first cover.

18. The method of claim 17 further comprising the steps of providing a second coil, and encircling the second coil with a second cover;

wherein the first cover cooperates with the coil base to provide a first fluid passageway around the first coil and the second cover cooperates with the coil base to provide a second fluid passageway around the second coil.

19. The method of claim 18 including the step of directing a fluid through a first inlet into the first fluid passageway and the step of directing a fluid through a second inlet into the second fluid passageway.

20. The method of claim 17 including the step of directing a fluid through a fluid aperture in the first coil support.

21. A method for making an electric motor using an electromagnetic force, the method comprising the steps of:

providing a magnet assembly; and

disposing a coil assembly manufactured by the method of claim 17 near the magnet assembly.

22. The method of claim 21 including the step of directing a fluid around the first coil to maintain an external surface of the coil assembly at a predetermined temperature.

23. A method of making an exposure apparatus, the method comprising the steps of:

providing a stage; and

connecting a motor manufactured by the method of claim 21 to the stage for moving the stage.

24. A method of making a device utilizing the exposure apparatus made by the method of claim 23.

25. A method for manufacturing a coil assembly for an electric motor, the method comprising the steps of:

providing a coil base;

providing a first coil;

encircling the first coil with a first cover;

securing the first coil to the coil base with a first coil support; and

directing a fluid through a fluid aperture in the first coil support.

26. The method of claim 25 further comprising the steps of providing a second coil, and encircling the second coil with a second cover;

wherein the first cover cooperates with the coil base to provide a first fluid passageway around the first coil and the second cover cooperates with the coil base to provide a second fluid passageway around the second coil.

27. The method of claim 26 including the step of directing a fluid through a first inlet into the first fluid passageway and the step of directing a fluid through a second inlet into the second fluid passageway.

28. The method of claim 25 wherein the step of securing the first coil includes cantilevering the first coil support away from the coil base towards the first cover, the first coil support being spaced apart from the first cover.

29. A method for making an electric motor using an electromagnetic force, the method comprising the steps of:

providing a magnet assembly; and

disposing a coil assembly manufactured by the method of claim 25 near the magnet assembly.

30. The method of claim 29 including the step of directing a fluid around the first coil to maintain an external surface of the coil assembly at a predetermined temperature.

31. A method of making an exposure apparatus, the method comprising the steps of:

providing a stage; and

connecting a motor manufactured by the method of claim 25 to the stage for moving the stage.

32. A method of making a device utilizing the exposure apparatus made by the method of claim 31.