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Apparatus and method for defining a pattern on a substrate

  • US 6,313,905 B1
  • Filed: 09/28/1999
  • Issued: 11/06/2001
  • Est. Priority Date: 09/28/1998
  • Status: Expired due to Fees
First Claim
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1. An apparatus for defining a pattern on a substrate, said apparatus comprisinga flexible member having a mounting base, a movable portion which is movable with respect to said mounting base, and defining at least one aperture which is positionable above said substrate, an emission source for directing an emission through said aperture and at said substrate, distance-controlling means for controlling the distance between said movable portion of the flexible member and said substrate, actuator means for moving said flexible member and said substrate relative to each other parallel to a surface of said substrate.

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