Apparatus and method for defining a pattern on a substrate

• US 6,313,905 B1
• Filed: 09/28/1999
• Issued: 11/06/2001
• Est. Priority Date: 09/28/1998
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Gimzewski, James K., Welland, Mark E., Luethi-Oetterli, Roland, Guéret, Pierre L., Schlittler, Räto R., Brugger, Juergen P.
• Primary Examiner(s): Adams, Russell
• Assistant Examiner(s): Brown, Khaled
• Application Number:
  US09/407,725
• Time in Patent Office: 770 Days
• Field of Search: 355/53, 355/55, 355/67, 356/399, 356/40, 356/401, 430/5, 430/20, 430/22, 430/30
• US Class Current: 355/55
• CPC Class Codes: G03F 7/2047 Exposure with radiation other than visible light or UV light, e.g. shadow printing, proximity printing
• CPC Class Codes: G03F 7/2049 using a cantilever
• CPC Class Codes: G03F 7/70283 Mask effects on the imaging process
• CPC Class Codes: H01J 2237/304 Controlling tubes
• CPC Class Codes: H01J 2237/31711 using mask
• CPC Class Codes: H01J 2237/31732 Depositing thin layers on selected microareas
• CPC Class Codes: H01J 2237/31737 using ions
• CPC Class Codes: H01J 2237/31755 using ion beams
• CPC Class Codes: H01J 37/3174 Particle-beam lithography, e.g. electron beam lithography
• CPC Class Codes: Y10S 977/855 for manufacture of nanostructure
• CPC Class Codes: Y10S 977/863 Atomic force probe
• CPC Class Codes: Y10S 977/869 Optical microscope
• CPC Class Codes: Y10S 977/881 Microscopy or spectroscopy, e.g. sem, tem
• CPC Class Codes: Y10S 977/888 Shaping or removal of materials, e.g. etching
• CPC Class Codes: Y10S 977/901 having step or means utilizing electromagnetic property, e.g. optical, x-ray, electron beamm

Abstract

The invention provides an apparatus and a method for defining a pattern on a substrate using a shadow masking technique. Said apparatus comprises a flexible member having a movable portion and at least one aperture. The flexible member is positioned in operation above the substrate thereby acting as a shadow mask. The apparatus further comprises a support for the substrate, distance-controlling means for controlling the distance between said movable portion and said substrate, and an actuator for moving the flexible member and substrate relative to each other parallel to a surface of the substrate. The apparatus further comprises an emission source which emits materials, electrons or light and which aims through the shadow mask at the substrate where the pattern is defined. Such a pattern might be employed in micromechanic, microoptic or microelectronic devices, for example. The described apparatus may be implemented using the AFM principal.

Claims

1. An apparatus for defining a pattern on a substrate, said apparatus comprising

a flexible member having a mounting base, a movable portion which is movable with respect to said mounting base, and defining at least one aperture which is positionable above said substrate,

an emission source for directing an emission through said aperture and at said substrate,

distance-controlling means for controlling the distance between said movable portion of the flexible member and said substrate,

actuator means for moving said flexible member and said substrate relative to each other parallel to a surface of said substrate.

2. The apparatus according to claim 1, wherein the distance between the flexible member and the substrate is controllable using atomic force microscopy (AFM) principle.

3. The apparatus according to claim 1, wherein the distance-controlling means comprises at least one tip attached to the flexible member to engage the substrate.

4. The apparatus according to claim 3, wherein the tip is adapted for pattern inspection on a substrate.

5. The apparatus according to claim 3, wherein the tip is conductive and is adapted for inspection.

6. The apparatus according to claim 5, wherein the tip is adapted for functional testing.

7. The apparatus according to claim 1, further including a monitoring means to monitor a property of a pattern.

8. The apparatus according to claim 7, further including emission control means for using the monitored property for controlling the effect of the emission on the surface of the substrate.

9. The apparatus according to claim 3, wherein the aperture is in one of the at least one tip.

10. The apparatus according to claim 1, wherein the aperture has been fabricated using Focused Ion Beam (FIB) technology.

11. The apparatus according to claim 1, wherein at least one side of the aperture is inclined to a surface of the flexible member.

12. The apparatus according to claim 1, wherein the direction of the emission from the emission source is inclined.

13. The apparatus according to claim 1, wherein the emission source is selected from the group comprising an electron source, a light source, and a material source.

14. The apparatus according to claim 13, wherein the emission source comprises a material source, said apparatus comprises material-deposition-reducing means for reducing the amount of material deposited on the flexible member.

15. The apparatus according to claim 1, wherein the emission source is arranged at the flexible member.

16. The apparatus according to claim 1, wherein at least one shutter is arranged for at least partially covering the aperture.

17. The apparatus according to claim 16, wherein the shutter is selected from the group comprising a movable mask, and a second flexible member with at least one aperture.

18. The apparatus according to claim 16, wherein the shutter is movable by shutter-actuating means.

19. The apparatus according to claim 1, comprising shading means for shading a region on the substrate from the emission source.

20. The apparatus according to claim 1, comprising several of the flexible members.

21. The apparatus according to claim 1, comprising multiple of the emission sources.

22. A method for defining a pattern on a substrate comprising:

positioning a flexible member above said substrate, said flexible member having a mounting base, a movable portion which is movable with respect to said mounting base, and defining at least one aperture;

emitting emissions from a emission source through said aperture and towards said substrate; and

controlling the distance between said movable portion of the flexible member and said substrate.

23. The method according to claim 22, wherein the flexible member and the substrate are moved relative to each other parallel to a surface of said substrate.

24. The method according to claim 22, wherein the distance between the flexible member and the substrate is controlled by atomic force microscopy (AFM) principle.

25. The method according to claim 22, wherein the distance between the flexible member and the substrate is controlled by the aid of at least one tip attached to the flexible member.

26. The method according to claim 25, wherein a pattern is inspected using a tip.

27. The method according to claim 22, wherein a property is monitored, and the effect of the emission on the surface of the substrate is controlled by the monitored property.

28. The method according to claim 22, wherein the amount of material deposited on the flexible member is controlled.

29. The method according to claim 22, wherein the aperture is at least partially covered using a shutter, and said shutter is moved by shutter-actuating means.