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Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber

  • US 6,315,512 B1
  • Filed: 11/25/1998
  • Issued: 11/13/2001
  • Est. Priority Date: 11/28/1997
  • Status: Expired due to Fees
First Claim
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1. A workpiece processing system comprising;

  • a storage area for storing workpieces;

    a processing chamber for processing workpieces;

    a transport robot adjacent to the storage area and the processing chamber;

    the transport robot comprising;

    a shaft;

    a first robot arm and a second robot arm operationally coupled to the shaft, the first robot arm and the second robot arm each including at least one paddle for supporting a workpiece, the paddle of the second robot arm being positioned lower that the paddle of the first robot arm;

    wherein the first robot arm and the second robot arm each have a plurality of rotational joints such that the first robot arm and the second robot arm are extensible toward the storage area when the shaft is in a first position and toward the processing chamber when the shaft is in a second position; and

    wherein the first robot arm and the second robot arm each have a fore member, the second robot arm having a paddle support member coupled to a distal end of the fore member of the second robot arm, the paddle of the second robot arm coupled to the paddle support member and positioned such that at least a portion of the fore member of the first robot arm passes over the paddle of the second robot arm without any of the rotational joints of the first robot arm passing over the paddle of the second robot arm.

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