Frequency selected, variable output inductor heater system

• US 6,316,754 B1
• Filed: 04/28/2000
• Issued: 11/13/2001
• Est. Priority Date: 07/09/1997
• Status: Expired due to Fees

• Current Assignee: Advanced Energy Industries Incorporated
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: Dorrenbacher, John M., Schatz, Douglas S.
• Primary Examiner(s): Leung, Philip H.
• Application Number:
  US09/462,402
• Time in Patent Office: 564 Days
• Field of Search: 219/656, 219/655, 219/662, 219/671, 219/666, 219/674, 219/672, 219/635, 219/638, 148/567, 148/572, 266/129
• US Class Current: 219/656
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: C30B 25/10 Heating of the reaction chamber or the substrate
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H05B 6/06 Control, e.g. of temperature, of power
• CPC Class Codes: H05B 6/44 having more than one coil or coil segment

Abstract

An induction heating systems using a plurality of zones in a coil provides selective heating control for better uniformity especially for semiconductor and other thin film processing applications. By arranging the zones to have different resonance frequencies, the power supply may control the various zones by altering its frequency output. The power supply may also act to control the differential heating by switching among zones in conjunction with the frequency control, by sweeping through a variety of frequencies, by simultaneously providing power over different frequencies, by altering the residence time at each frequency, or by outputting different powers to each frequency or the like. Each zone may thus be tuned as appropriate to achieve the desired induction heating characteristic.

Claims

1. A multizone induction heating system comprising:

a. a coil system divided into a plurality of zones, at least two of said zones having an electrical resonance frequency, said resonance frequencies having at least two different values;

b. a power supply having an output frequency; and

c. a control system to control the power delivered to each of said zones comprising a control circuit to change said output frequency of said power supply.

2. A multizone induction heating system as described in claim 1 wherein said coil system comprises a plurality of coils.

3. A multizone induction heating system as described in claim 1 wherein said coil system comprises at least one coil divided into a plurality of sections.

4. A multizone induction heating system as described in claim 1 wherein said control system further comprises a circuit to switch said output frequency among at least two operating frequencies.

5. A multizone induction heating system as described in claim 4 wherein said control system further comprises a circuit to vary the output power of said power supply while said output frequency is switched among said operating frequencies.

6. A multizone induction heating system as described in claim 4 wherein said control system further comprises a circuit to vary the residence times at each of said operating frequencies of said power supply.

7. A multizone induction heating system as described in claim 1 wherein said control system further comprises a circuit to vary said output frequency continuously over a range of frequencies.

8. A multizone induction heating system comprising:

a. a coil system divided into a plurality of zones, at least two of said zones having an electrical resonance frequency, said resonance frequencies having at least two different values;

b. a power supply having at least two simultaneously emitted output frequencies;

c. a control system to control the power delivered to each of said zones wherein said at least two output frequencies are established to cause differentiated amounts of inductive heating by said zones.

9. A multizone induction heating system as described in claim 8 wherein said coil system comprises a plurality of coils.

10. A multizone induction heating system as described in claim 8 wherein said coil system comprises at least one coil divided into a plurality of sections.

11. A multizone induction heating system as described in claim 8 wherein at least one of said simultaneously emitted output frequencies operates at about the resonance frequency of one of said plurality of zones of said coil system.

12. A multizone induction heating system as described in claim 11 wherein at least one of said simultaneously emitted output frequencies operates at other than a resonance frequency of one any of said zones.

13. A multizone induction heating system as described in claim 12 wherein said control system to control the power delivered to each of said zones further compirses variable tuning circuitry configured to alter the amount of inductive heating caused by at least one of said zones.

14. A multizone induction heating system as described in claim 13 wherein said variable tuning circuitry comprises multiple frequency circuitry.

15. A multizone induction heating system as described in claim 13 wherein said variable tuning circuitry comprises resonance frequency variation circuitry.

16. A multizone induction heating system as described in claim 15 wherein said resonance frequency variation circuitry comprises at least one variable impedance element.

17. A multizone induction heating system as described in claim 11 wherein said control system to control the power delivered to each of said zones further comprises variable tuning circuitry configured to alter the amount of inductive heating caused by at least one of said zones.

18. A multizone induction heating system as described in claim 17 wherein said variable tuning circuitry comprises multiple frequency circuitry.

19. A multizone induction heating system as described in claim 17 wherein said variable tuning circuitry comprises resonance frequency variation circuitry.

20. A multizone induction heating system as described in claim 19 wherein said resonance frequency variation circuitry comprises at least one variable impedance element.

21. A multizone induction heating system as described in claim 8 wherein at least one of said simultaneously emitted output frequencies operates at other than a resonance frequency of one any of said zones.

22. A multizone induction heating system as described in claim 21 wherein said control system to control the power delivered to each of said zones further comprises variable tuning circuitry configured to alter the amount of inductive heating caused by at least one of said zones.

23. A multizone induction heating system as described in claim 22 wherein said variable tuning circuitry comprises multiple frequency circuitry.

24. A multizone induction heating system as described in claim 22 wherein said variable tuning circuitry comprises resonance frequency variation circuitry.

25. A multizone induction heating system as described in claim 24 wherein said resonance frequency variation circuitry comprises at least one variable impedance element.

26. A multizone induction heating system as described in claim 8 wherein said control system to control the power delivered to each of said zones further comprises variable tuning circuitry configured to alter the amount of inductive heating caused by at least one of said zones.

27. A multizone induction heating system as described in claim 26 wherein said variable tuning circuitry comprises multiple frequency circuitry.

28. A multizone induction heating system as described in claim 26 wherein said variable tuning circuitry comprises resonance frequency variation circuitry.

29. A multizone induction heating system as described in claim 28 wherein said resonance frequency variation circuitry comprises at least one variable impedance element.

30. A multizone induction heating system comprising:

a. a coil system divided into a plurality of zones, at least two of said zones having an electrical resonance frequency, said resonance frequencies having at least two different values;

b. at least one power supply having at least one output frequency; and

c. a control system to control the power delivered to each of said zones comprising unswitched resonant circuitry which establishes the resonance frequency of each of said zones and which establishes differentiated amounts of inductive heating by said zones.

31. A multizone induction heating system as described in claim 30 wherein said coil system comprises a plurality of coils.

32. A multizone induction heating system as described in claim 30 wherein said coil system comprises at least one coil divided into a plurality of sections.

33. A multizone induction heating system as described in claim 30 wherein said output frequency operates at about the resonance frequency of one of said plurality of zones of said coil system.

34. A multizone induction heating system as described in claim 33 wherein said control system to control the power delivered to each of said zones further comprises variable tuning circuitry configured to alter the amount of inductive heating caused by at least one of said zones.

35. A multizone induction heating system as described in claim 34 wherein said unswitched resonant circuitry which establishes the resonance frequency of each of said zones comprises:

a. a first group of unswitched resonant circuitry which establishes resonance frequencies of a first group of zones; and

b. a second group of unswitched resonant circuitry which establishes resonance frequencies of a second group of zones;

and wherein said control system further comprises switching circuitry which is configured to selectively provide power to each of said groups of unswitched resonant circuitries.

36. A multizone induction heating system as described in claim 34 wherein said variable tuning circuitry comprises frequency switching circuitry.

37. A multizone induction heating system as described in claim 34 wherein said variable tuning circuitry comprises multiple frequency circuitry.

38. A multizone induction heating system as described in claim 33 wherein said unswitched resonant circuitry which establishes the resonance frequency of each of said zones comprises:

a. a first group of unswitched resonant circuitry which establishes resonance frequencies of a first group of zones; and

b. a second group of unswitched resonant circuitry which establishes resonance frequencies of a second group of zones;

and wherein said control system further comprises switching circuitry which is configured to selectively provide power to each of said groups of unswitched resonant circuitries.

39. A multizone induction heating system as described in claim 34 wherein said variable tuning circuitry comprises resonance frequency variation circuitry.

40. A multizone induction heating system as described in claim 39 wherein said resonance frequency variation circuitry comprises at least one variable impedance element.

41. A multizone induction heating system as described in claim 30 wherein said control system to control the power delivered to each of said zones further comprises variable tuning circuitry configured to alter the amount of inductive heating caused by at least one of said zones.

42. A multizone induction heating system as described in claim 41 wherein said variable tuning circuitry comprises frequency switching circuitry.

43. A multizone induction heating system as described in claim 41 wherein said unswitched resonant circuitry which establishes the resonance frequency of each of said zones comprises:

a. a first group of unswitched resonant circuitry which establishes resonance frequencies of a first group of zones; and

b. a second group of unswitched resonant circuitry which establishes resonance frequencies of a second group of zones;

and wherein said control system further comprises switching circuitry which is configured to selectively provide power to each of said groups of unswitched resonant circuitries.

44. A multizone induction heating system as described in claim 41 wherein said variable tuning circuitry comprises multiple frequency circuitry.

45. A multizone induction heating system as described in claim 41 wherein said variable tuning circuitry comprises resonance frequency variation circuitry.

46. A multizone induction heating system as described in claim 45 wherein said resonance frequency variation circuitry comprises at least one variable impedance element.

47. A multizone induction heating system as described in claim 30 wherein said unswitched resonant circuitry which establishes the resonance frequency of each of said zones comprises:

a. a first group of unswitched resonant circuitry which establishes resonance frequencies of a first group of zones; and

b. a second group of unswitched resonant circuitry which establishes resonance frequencies of a second group of zones;

and wherein said control system further comprises switching circuitry which is configured to selectively provide power to each of said groups of unswitched resonant circuitries.

48. A multizone induction heating system as described in claim 30 wherein said unswitched resonant circuitry comprises unswitched resonance frequency circuitry which primarily affects one of said zones.