Thermal detector with bolometric effect amplification

• US 6,316,770 B1
• Filed: 06/28/1999
• Issued: 11/13/2001
• Est. Priority Date: 07/06/1998
• Status: Expired due to Term

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: Ouvrier-Buffet, Jean-Louis, Yon, Jean-Jacques
• Primary Examiner(s): Hannaher, Constantine
• Assistant Examiner(s): Israel, Andrew
• Application Number:
  US09/340,828
• Time in Patent Office: 869 Days
• Field of Search: 250/338.1, 250/338.4, 250/336.1, 250/349
• US Class Current: 250/338.1
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Abstract

This detector has a resistive element (4) able to undergo heating which is provided with electrical biasing means (6, 8) for amplifying or increasing the heating, a thermometer (12) thermally coupled to the element and converting a temperature variation undergone by the thermometer into an electric signal, and a device (18) for reading the electric signal. The invented detector can be applied to measure and detect infrared radiation. The detector can also be applied to measure and detect radiation of different wavelengths.

Claims

1. Thermal detector for measuring heat from a scene, characterized in that it comprises:

a resistive heat amplifying element (4;

22, 24) able to undergo a heating from said scene and provided with electrical biasing means (6, 8;

26, 28) for causing the element to amplify said heating,

a thermometer (12;

34, 36;

40, 42, 44, 46;

51, 52, 54;

60, 62) thermally coupled to the resistive heat amplifying element and able to convert a temperature variation undergone by said thermometer into an electric signal, said thermometer receiving and measuring amplified heat from said scene via said resistive heat amplifying element, said heat amplifying element amplifying heat input to said thermometer proportionately to heat from the scene, and

means (18) for reading said electric signal.

2. Detector according to claim 1, wherein the resistive element comprises at least one resistive layer (4;

22, 24) and the biasing means comprise two electrodes (6, 8;

26, 28), the assembly formed by said layer and said two electrodes being electrically insulated from the thermometer.

3. Detector according to claim 2, wherein the electrodes are placed on the same side of the resistive layer.

4. Detector according to claim 2, wherein the electrodes are placed on either side of the resistive layer.

5. Detector according to claim 1, wherein the resistive element has a negative temperature coefficient, the biasing then being a voltage biasing.

6. Detector according to claim 5, wherein the resistive element is made from a material chosen from within the group consisting of oxides of vanadium, amorphous silicon and amorphous SiGe.

7. Detector according to claim 1, wherein the resistive element has a positive temperature coefficient, the biasing then being a current biasing.

8. Detector according to claim 1, wherein the thermometer is chosen from within the group consisting of thermopiles (34, 36), p-n junctions, Schottky barriers, electrical resistors, ferroelectric thermometers (51, 52, 54), pyroelectric thermometers, mechanical deformation thermometers (42, 44, 46, 48), pneumatic thermometers, and thermometers having at least one microtip (60).

9. Detector according to claim 1, wherein the thermometer is produced by a microelectronics procedure.

10. Detector according to claim 1, wherein the resistive element is produced by a microelectronics procedure.

11. Detector according to claim 1, which has a microbridge structure.

12. Thermal detector having a matrix structure, comprising at least two detectors (68) according to claim 1.

13. Thermal detector according to claim 1, wherein each resistive element is provided for undergoing heating by means of infrared radiation (2).