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Electronically controlled cryopump

  • US 6,318,093 B2
  • Filed: 04/05/2001
  • Issued: 11/20/2001
  • Est. Priority Date: 09/13/1988
  • Status: Expired due to Fees
First Claim
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1. A method of controlling and performing diagnostic procedures with respect to a cryopump comprising:

  • coupling local electronics to the cryopump, the electronics being programmed to provide individual control of the cryopump during operation and to store diagnostic operating parameters of the cryopump in a data history;

    controlling operation of the cryopump, including regeneration of the cryopump, by the local electronics;

    sensing diagnostic regeneration parameters for an individual cryopump during operation of the cryopump;

    storing the sensed parameters in the data history of the local electronic coupled to the cryopump; and

    accessing the stored data history by means of a remote computer and processing the accessed data in diagnostic procedures in the remote computer.

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