Sensor and method of use
First Claim
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1. A sensor comprising:
- a substrate;
an electrode coupled to the substrate and movable relative to the substrate along three axes substantially orthogonal to each other; and
a structure coupled to the substrate, stationary relative to the substrate, and located at an outer perimeter of the electrode wherein the structure limits mobility of the electrode along the three axes.
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Abstract
A sensor has an electrode (120) that is movable along three mutually perpendicular axes (10, 11, 12). The sensor also has stationary over-travel limiting structures that restrict the movement of the electrode (120) along the three axes (10, 11, 12).
34 Citations
18 Claims
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1. A sensor comprising:
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a substrate;
an electrode coupled to the substrate and movable relative to the substrate along three axes substantially orthogonal to each other; and
a structure coupled to the substrate, stationary relative to the substrate, and located at an outer perimeter of the electrode wherein the structure limits mobility of the electrode along the three axes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
wherein the structure is positioned proximate at the ends of the plurality of fingers. -
7. The sensor of claim 6 wherein the body has a plurality of holes.
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8. The sensor of claim 6 wherein the body has a side and wherein the plurality of fingers are substantially perpendicular to the side of the body.
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9. The sensor of claim 6 further comprising two additional electrodes wherein the structure and a first one of the plurality of fingers is located between the two additional electrodes, wherein the two additional electrodes are stationary relative to the substrate.
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10. The sensor of claim 9 wherein a surface of a first one of the two additional electrodes has a protrusion extending away from the surface and toward the first one of the plurality of fingers to limit the mobility of the electrode along the first axis and to prevent the first one of the plurality of fingers from contacting the surface of the first one of the two additional electrodes, and wherein the sensor detects acceleration along the first axis.
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11. The sensor of claim 9 wherein a surface of the first one of the plurality of fingers has a protrusion extending away from the surface of the first one of the plurality of fingers and toward a first one of the two additional electrodes to limit the mobility of the electrode along the first axis and to prevent the surface of the first one of the plurality of fingers from contacting the first one of the two additional electrodes, and wherein the sensor detects acceleration along the first axis.
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12. The sensor of claim 6 wherein the structure has a recess, wherein the end of a first one of the plurality of fingers protrudes into the recess to limit the mobility of the electrode along first and second axes of the three axes, wherein the first and second axes are substantially parallel to a surface of the substrate, wherein the structure and the electrode overlie the surface of the substrate, and wherein the sensor detects acceleration along the first axis.
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13. The sensor of claim 12 wherein the structure has a side surface substantially perpendicular to the surface of the substrate and wherein the recess of the structure is located in the side surface of the structure.
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14. The sensor of claim 12 wherein the structure has a flap overlying both the recess and the end of the first one of the plurality of fingers to limit the mobility of the electrode along a third axis of the three axes wherein the third axis is substantially orthogonal to the surface of the substrate.
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15. The sensor of claim 12 further comprising two additional electrodes wherein the structure and the first one of the plurality of fingers is located between the two additional electrodes, and wherein the two additional electrodes are stationary relative to the substrate.
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16. The sensor of claim 1 further comprising:
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an anchor coupled to the substrate; and
a beam coupling the anchor to the electrode wherein the anchor and the beam suspend the electrode above the substrate and wherein the beam has a protrusion to limit the mobility of the electrode.
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17. The sensor of claim 1 further comprising:
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an anchor coupled to the substrate; and
a beam coupling the anchor to the electrode wherein the anchor and the beam suspend the electrode above the substrate and wherein the anchor has a protrusion to limit the mobility of the electrode.
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18. A method of using a sensor comprising:
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providing a substrate;
providing an electrode coupled to the substrate, the electrode movable along three axes relative to the substrate, the electrode having a body and a plurality of fingers each with a first end coupled to the body and a second end extending away from the body; and
limiting movement of the second ends of the plurality of fingers to limit movement of the electrode along the three axes.
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Specification
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- Resources
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Current AssigneeNXP USA, Inc. (NXP Semiconductors NV)
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Original AssigneeMotorola, Inc. (Motorola Solutions, Inc.)
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InventorsGer, Muh-Ling, Foerstner, Juergen A., Bergstrom, Paul L., Li, Guang X., Schmiesing, John E., Shemansky, Frank A. Jr.
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Primary Examiner(s)KWOK, HELEN C
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Application NumberUS09/538,637Time in Patent Office600 DaysField of Search735/143.2, 735/143.6, 735/143.8, 735/142.1, 735/142.4, 735/10, 361/280, 361/283.1, 361/283.3US Class Current73/510CPC Class CodesG01P 15/0802 DetailsG01P 15/125 by capacitive pick-upG01P 2015/0814 for translational movement ...
