Fluid drop ejector

• US 6,318,841 B1
• Filed: 10/14/1999
• Issued: 11/20/2001
• Est. Priority Date: 10/15/1998
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Coleman, Charles P., Feinberg, Kathleen A., Gooray, Arthur M., Roller, George J.
• Primary Examiner(s): NGUYEN, THINH H
• Application Number:
  US09/418,406
• Time in Patent Office: 768 Days
• Field of Search: 347/44, 347/20, 347/32
• US Class Current: 347/44
• CPC Class Codes: B41J 2/14314 Structure of ink jet print heads with electrostatically actuated membrane
• CPC Class Codes: B41J 2/16 Production of nozzles
• CPC Class Codes: B41J 2/1606 Coating the nozzle area or the ink chamber
• CPC Class Codes: B41J 2/1623 bonding and adhesion
• CPC Class Codes: B41J 2/1626 etching
• CPC Class Codes: B41J 2/1634 laser machining
• CPC Class Codes: B41J 2/1639 sacrificial molding

Abstract

The silicon fluid ejector of the present invention includes an electrostatically actuated micromachined positive displacement mechanism consisting of a piston, piston containment structure, piston retraction mechanism and an ejection orifice. These features provide for very low cost of production, high reliability and “on demand” drop size modulation. The fluid ejector mechanism can be easily produced via monolithic batch fabrication based on the common production technique of surface micromachining.

Claims

1. A fluid drop ejector comprising:

a containment wall,

a nozzle plate layer disposed at one end of the containment wall, the nozzle plate layer including a nozzle opening,

a piston layer disposed at the opposite end of the containment wall, the piston layer comprising a piston surface facing and substantially aligned with the nozzle opening,

the containment wall, nozzle plate layer and piston surface defining a cavity that is arranged for containing fluid,

the piston layer arranged for moving towards the nozzle opening when a fluid ejecting electric field is applied between the piston layer and the nozzle plate layer, thus causing fluid to be ejected through the nozzle opening.

2. The fluid drop ejector of claim 1, the fluid comprising ink.

3. The fluid drop ejector of claim 1, the piston surface being substantially circular in shape.

4. The fluid drop ejector of claim 1, the piston surface being substantially square in shape.

5. The fluid drop ejector of claim 1, the piston surface being substantially rectangular in shape.

6. The fluid drop ejector of claim 1, further comprising ejecting signal means for applying an ejecting signal between the piston layer and the nozzle plate layer, the ejecting signal arranged for modulating the amount of fluid that is ejected through the nozzle opening.

7. The fluid drop ejector of claim 6, the piston surface forming an ejection stroke when the piston layer moves towards the nozzle opening, the ejection stroke comprising an ejection stroke magnitude, the ejecting signal arranged for controlling the ejection stroke magnitude.

8. The fluid drop ejector of claim 6, the piston surface forming a piston speed when the piston layer moves towards the nozzle opening, the ejecting signal arranged for controlling the piston speed.

9. The fluid drop ejector of claim 6, the ejecting signal comprising a step function.

10. The fluid drop ejector of claim 6, the ejecting signal comprising a bipolar pulse train.

11. The fluid drop ejector of claim 10, the ejecting signal further comprising an envelope that decreases in time.

12. The fluid drop ejector of claim 1, further comprising a substrate, the substrate including a substrate surface, the containment wall being disposed on the substrate surface.

13. The fluid drop ejector of claim 12, further comprising a plurality of piston springs radiating away from the piston surface and coupled to the substrate surface.

14. The fluid drop ejector of claim 13, the plurality of piston springs arranged for providing mechanical spring tension for moving the piston layer towards the substrate when the fluid ejecting electric field is removed.

15. The fluid drop ejector of claim 12, a faceplate layer disposed on the nozzle layer, the faceplate layer including a faceplate opening substantially congruent with the nozzle opening.

16. The fluid drop ejector of claim 12, the piston layer spaced a substantially fixed distance away from the substrate surface, a retractor layer being disposed on the substrate surface between the piston layer and the substrate, the piston layer arranged for moving towards the substrate when a retracting electric field is applied between the piston layer and the retractor layer.

17. The fluid drop ejector of claim 16, further comprising retracting signal means for applying a retracting signal between the piston layer and the retractor layer.

18. The fluid drop ejector of claim 1, further comprising a substrate, the substrate including a substrate surface, the nozzle plate layer being disposed on the substrate surface, the substrate layer including a substrate opening substantially congruent with the nozzle opening.

19. A fluid drop ejector array comprising a plurality of fluid drop ejectors, each fluid drop ejector comprising:

a containment wall,

a nozzle plate layer disposed at one end of the containment wall, the nozzle plate layer including a nozzle opening,

a piston layer disposed at the opposite end of the containment wall, the piston layer comprising a piston surface facing and substantially aligned with the nozzle opening,

the containment wall, nozzle plate layer and piston surface defining a cavity that is arranged for containing fluid, the piston layer arranged for moving towards the nozzle opening when a fluid ejecting electric field is applied between the piston layer and the nozzle plate layer, thus causing fluid to be ejected through the nozzle opening.

20. The fluid drop ejector array of claim 19, in each fluid drop ejector, the fluid comprising ink.

21. The fluid drop ejector array of claim 19, the piston surface of each fluid drop ejector being substantially circular in shape.

22. The fluid drop ejector array of claim 19, the piston surface of each fluid drop ejector being substantially square in shape.

23. The fluid drop ejector array of claim 19, the piston surface of each fluid drop ejector being substantially rectangular in shape.

24. The fluid drop ejector array of claim 19, each fluid drop ejector further comprising ejecting signal means for applying an ejecting signal between the piston layer and the nozzle plate layer, the ejecting signal arranged for modulating the amount of fluid that is ejected through the nozzle opening.

25. The fluid drop ejector array of claim 24, the piston surface forming an ejection stroke when the piston layer moves towards the nozzle opening, the ejection stroke comprising an ejection stroke magnitude, the ejecting signal arranged for controlling the ejection stroke magnitude.

26. The fluid drop ejector array of claim 24, the piston surface forming a piston speed when the piston layer moves towards the nozzle opening, the ejecting signal arranged for controlling the piston speed.

27. The fluid drop ejector array of claim 24, the ejecting signal comprising a step function.

28. The fluid drop ejector array of claim 24, the ejecting signal comprising a bipolar pulse train.

29. The fluid drop ejector array of claim 28, the ejecting signal further comprising an envelope that decreases in time.

30. The fluid drop ejector array of claim 19, each fluid drop ejector further comprising a substrate, the substrate including a substrate surface, the containment wall being disposed on the substrate surface.

31. The fluid drop ejector array of claim 30, each fluid drop ejector further comprising a plurality of piston springs radiating away from the piston surface and coupled to the substrate surface.

32. The fluid drop ejector array of claim 31, the plurality of piston springs arranged for providing mechanical spring tension for moving the piston layer towards the substrate when the fluid ejecting electric field is removed.

33. The fluid drop ejector array of claim 30, each fluid drop ejector further comprising a faceplate layer disposed on the nozzle layer, the faceplate layer including a faceplate opening substantially congruent with the nozzle opening.

34. The fluid drop ejector array of claim 30, in each fluid drop ejector, the piston layer spaced a substantially fixed distance away from the substrate surface, a retractor layer being disposed on the substrate surface between the piston layer and the substrate, the piston layer arranged for moving towards the substrate when a retracting electric field is applied between the piston layer and the retractor layer.

35. The fluid drop ejector array of claim 34, each fluid drop ejector further comprising retracting signal means for applying a retracting signal between the piston layer and the retractor layer.

36. The fluid drop ejector array of claim 19, each fluid drop ejector further comprising a substrate, the substrate including a substrate surface, the nozzle plate layer being disposed on the substrate surface, the substrate layer including a substrate opening substantially congruent with the nozzle opening.

37. The fluid drop ejector array of claim 19, comprising a 1-dimensional array.

38. The fluid drop ejector array of claim 19, comprising a 2-dimensional array.

39. A printing machine comprising an ink drop ejector array comprising a plurality of ink drop ejectors, each ink drop ejector comprising:

a containment wall,

a nozzle plate layer disposed at one end of the containment wall, the nozzle plate layer including a nozzle opening,

a piston layer disposed at the opposite end of the containment wall, the piston layer comprising a piston surface facing and substantially aligned with the nozzle opening,

the containment wall, nozzle plate layer and piston surface defining a cavity that is arranged for containing ink,

the piston layer arranged for moving towards the nozzle opening when a ink ejecting electric field is applied between the piston layer and the nozzle plate layer, thus causing ink to be ejected through the nozzle opening.

40. The printing machine of claim 39, the piston surface of each ink drop ejector being substantially circular in shape.

41. The printing machine of claim 39, the piston surface of each ink drop ejector being substantially square in shape.

42. The printing machine of claim 39, the piston surface of each ink drop ejector being substantially rectangular in shape.

43. The printing machine of claim 39, each ink drop ejector further comprising ejecting signal means for applying an ejecting signal between the piston layer and the nozzle plate layer, the ejecting signal arranged for modulating the amount of ink that is ejected through the nozzle opening.

44. The printing machine of claim 43, the piston surface forming an ejection stroke when the piston layer moves towards the nozzle opening, the ejection stroke comprising an ejection stroke magnitude, the ejecting signal arranged for controlling the ejection stroke magnitude.

45. The printing machine of claim 43, the piston surface forming a piston speed when the piston layer moves towards the nozzle opening, the ejecting signal arranged for controlling the piston speed.

46. The printing machine of claim 43, the ejecting signal comprising a step function.

47. The printing machine of claim 43, the ejecting signal comprising a bipolar pulse train.

48. The printing machine of claim 47, the ejecting signal further comprising an envelope that decreases in time.

49. The printing machine of claim 39, each ink drop ejector further comprising a substrate, the substrate including a substrate surface, the containment wall being disposed on the substrate surface.

50. The printing machine of claim 49, each ink drop ejector further comprising a plurality of piston springs radiating away from the piston surface and coupled to the substrate surface.

51. The printing machine of claim 50, the plurality of piston springs arranged for providing mechanical spring tension for moving the piston layer towards the substrate when the ink ejecting electric field is removed.

52. The printing machine of claim 49, each ink drop ejector further comprising a faceplate layer disposed on the nozzle layer, the faceplate layer including a faceplate opening substantially congruent with the nozzle opening.

53. The printing machine of claim 49, in each ink drop ejector, the piston layer spaced a substantially fixed distance away from the substrate surface, a retractor layer being disposed on the substrate surface between the piston layer and the substrate, the piston layer arranged for moving towards the substrate when a retracting electric field is applied between the piston layer and the retractor layer.

54. The printing machine of claim 53, each ink drop ejector further comprising retracting signal means for applying a retracting signal between the piston layer and the retractor layer.

55. The printing machine of claim 39, each ink drop ejector further comprising a substrate, the substrate including a substrate surface, the nozzle plate layer being disposed on the substrate surface, the substrate layer including a substrate opening substantially congruent with the nozzle opening.

56. The printing machine of claim 39, the ink drop ejector array comprising a 1-dimensional array.

57. The printing machine of claim 39, the ink drop ejector array comprising a 2-dimensional array.