Apparatus for surface modification of polymer, metal and ceramic materials using ion beam

• US 6,319,326 B1
• Filed: 08/07/2000
• Issued: 11/20/2001
• Est. Priority Date: 12/05/1997
• Status: Expired due to Fees

• Current Assignee: Korea Advanced Institute of Science and Technology
• Original Assignee: Korea Advanced Institute of Science and Technology
• Inventors: Choi, Won Kook, Cho, Jung, Jung, Hyung Jin, Koh, Seok-Keun
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): HASSANZADEH, PARVIZ
• Application Number:
  US09/555,832
• Time in Patent Office: 470 Days
• Field of Search: 118/723.EB, 118/718, 118/719, 118/723.FI, 118/723.FE, 118/729, 118/723.MP, 118/723.VE, 118/720, 118/715, 118/716, 156/345
• US Class Current: 118/718
• CPC Class Codes: C23C 16/4417 Methods specially adapted for coating powder
• CPC Class Codes: C23C 16/486 using ion beam radiation
• CPC Class Codes: D06B 19/00 Treatment of textile materials by liquids, gases or vapours, not provided for in groups D06B1/00 - D06B17/00
• CPC Class Codes: H01J 2237/338 Changing chemical properties of treated surfaces
• CPC Class Codes: H01J 37/317 for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation H01J37/36 takes precedence
• CPC Class Codes: H01J 37/3277 of continuous material

Abstract

An apparatus for surface modification of a polymer, metal, and ceramic material using an ion beam (IB) is disclosed, which is capable of supplying and controlling a voltage (220) applied to a material to be surface-modified so that an ion beam (IB) energy irradiated to the material is controlled, the degree of the vacuum of a reaction gas in a portion of a vacuum chamber in which the ion beam is irradiated is differentiated from that in a portion in which the ion beam is generated, and both-side irradiating processing and continuous processing is applicable.

Claims

1. An apparatus for continuous surface modification of a material using an ion beam, comprising:

a chamber;

a vacuum means for maintaining a vacuum within the chamber;

two or more ion sources each having an ion gun and provided in an upper or lower portion of the chamber, or in at least two respective opposing locations within the chamber for generating respective ion beams and irradiating the ion beams respectively to front and/or back or opposing surfaces of a material to be surface-modified;

a means for supplying the material; and

a reaction gas supplying means including a reaction gas inlet for supplying a reaction gas to respective surfaces of the material onto which the ion beam generated from the ion source is irradiated,

wherein the material is continuously supplied to a reaction region in the chamber over which the ion beams are irradiated, and drawn off from the reaction region.

2. The apparatus according to claim 1, wherein two or more vacuum means are provided, and further comprising a separating means for separating a material reaction portion of the chamber in which the surface is modified when the reaction gas is supplied to the material surface, from a portion of the chamber in which the ion source is provided, wherein the vacuum level in the material reaction portion of the chamber is maintained to be higher than that in the portion of the chamber in which the ion source is provided.

3. The apparatus according to claim 1, wherein said material is wound in a roll, one end of said material being unrolled in one side of the chamber to be entered into the reaction region, and the part of the material entered into the reaction region is surface-modified by irradiating the ion beam thereon, and then the modified material is rolled up again in the other side of the chamber.

4. The apparatus according to claim 3, wherein said rolled material is received in the chamber.

5. The apparatus according to claim 3, wherein said rolled material is provided outside the chamber, and the material is unwound from outside of the chamber to the chamber having the reaction region, and the surface-modified material is drawn off outside the chamber and wound again in a roll.

6. The apparatus according to claim 5, wherein the degree of vacuum in the chamber is the highest in the reaction region when the to-be surface-modified material is supplied from the outside of the reaction chamber to the reaction region and the surface-modified material is drawn off to the outside of the chamber.

7. The apparatus according to claim 1, wherein said material is supplied and drawn off in wafers.

8. The apparatus according to claim 7, wherein the degree of vacuum in the chamber is the highest in the reaction region when the material to be surface-modified is supplied from the outside of the reaction chamber to the reaction region and the surface-modified material is drawn off to the outside of the chamber.