Modification of 193 nm sensitive photoresist materials by electron beam exposure
First Claim
Patent Images
1. A process for producing an etch resistant image which comprises:
- (a) coating and drying a photosensitive composition onto a substrate, which photosensitive composition comprises (i) at least one water insoluble, acid decomposable polymer which is substantially transparent to ultraviolet radiation at a wavelength of about 193 nm, wherein said polymer is present in the photosensitive composition in an amount sufficient to form a uniform film of the composition components when it is coated on a substrate and dried;
(ii) at least one photosensitive compound capable of generating an acid upon exposure to sufficient activating energy at a wavelength of about 193 nm, said photosensitive compound being present in an amount sufficient to substantially uniformly photosensitize the photosensitive composition;
(b) imagewise exposing the photosensitive composition to sufficient activating energy at a wavelength of 193 nm to cause the photosensitive compound to generate sufficient acid to decompose the polymer in the imagewise exposed areas of the photosensitive composition;
(c) developing the photosensitive composition to thereby remove the exposed nonimage areas and leaving the unexposed image areas of the photosensitive composition;
(d) irradiating the image areas of the photosensitive composition to sufficient electron beam radiation to thereby increase the resistance of the photosensitive composition in the image areas to an etchant.
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Abstract
A process for increasing the etch resistance of photoresists, especially positive working 193 nm sensitive photoresists which are suitable for use in the production of microelectronic devices such as integrated circuits. A 193 nm photosensitive composition is coated onto a substrate, exposed to activating energy at a wavelength of 193 nm to decompose the polymer in the imagewise exposed areas; and developed to remove the exposed nonimage areas. Then the image areas are exposed to sufficient electron beam radiation to increase the resistance of the image areas to an etchant.
77 Citations
28 Claims
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1. A process for producing an etch resistant image which comprises:
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(a) coating and drying a photosensitive composition onto a substrate, which photosensitive composition comprises (i) at least one water insoluble, acid decomposable polymer which is substantially transparent to ultraviolet radiation at a wavelength of about 193 nm, wherein said polymer is present in the photosensitive composition in an amount sufficient to form a uniform film of the composition components when it is coated on a substrate and dried;
(ii) at least one photosensitive compound capable of generating an acid upon exposure to sufficient activating energy at a wavelength of about 193 nm, said photosensitive compound being present in an amount sufficient to substantially uniformly photosensitize the photosensitive composition;
(b) imagewise exposing the photosensitive composition to sufficient activating energy at a wavelength of 193 nm to cause the photosensitive compound to generate sufficient acid to decompose the polymer in the imagewise exposed areas of the photosensitive composition;
(c) developing the photosensitive composition to thereby remove the exposed nonimage areas and leaving the unexposed image areas of the photosensitive composition;
(d) irradiating the image areas of the photosensitive composition to sufficient electron beam radiation to thereby increase the resistance of the photosensitive composition in the image areas to an etchant. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A process for producing a microelectronic device image which comprises:
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(a) coating and drying a photosensitive composition onto a semiconductor substrate, which photosensitive composition comprises (i) at least one water insoluble, acid decomposable polymer which is substantially transparent to ultraviolet radiation at a wavelength of about 193 nm, wherein said polymer is present in the photosensitive composition in an amount sufficient to form a uniform film of the composition components when it is coated on a substrate and dried;
(ii) at least one photosensitive compound capable of generating an acid upon exposure to sufficient activating energy at a wavelength of about 193 nm, said photosensitive compound being present in an amount sufficient to substantially uniformly photosensitize the photosensitive composition;
(b) imagewise exposing the photosensitive composition to sufficient activating energy at a wavelength of 193 nm to cause the photosensitive compound to generate sufficient acid to decompose the polymer in the imagewise exposed areas of the photosensitive composition;
(c) developing the photosensitive composition to thereby remove the exposed nonimage areas and leaving the unexposed image areas of the photosensitive composition;
(d) irradiating the image areas of the photosensitive composition to sufficient electron beam radiation to thereby increase the resistance of the photosensitive composition in the image areas to an etchant. - View Dependent Claims (26)
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27. A microelectronic device image produced by a process which comprises:
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(a) coating and drying a photosensitive composition onto a semiconductor substrate, which photosensitive composition comprises (i) at least one water insoluble, acid decomposable polymer which is substantially transparent to ultraviolet radiation at a wavelength of about 193 nm, wherein said polymer is present in the photosensitive composition in an amount sufficient to form a uniform film of the composition components when it is coated on a substrate and dried;
(ii) at least one photosensitive compound capable of generating an acid upon exposure to sufficient activating energy at a wavelength of about 193 nm, said photosensitive compound being present in an amount sufficient to substantially uniformly photosensitive the photosensitive composition;
(b) imagewise exposing the photosensitive composition to sufficient activating energy at a wavelength of 193 nm to cause the photosensitive compound to generate sufficient acid to decompose the polymer in the imagewise exposed areas of the photosensitive composition;
(c) developing the photosensitive composition to thereby remove the exposed nonimage areas and leaving the unexposed image areas of the photosensitive composition;
(d) irradiating the image areas of the photosensitive composition to sufficient electron beam radiation to thereby increase the resistance of the photosensitive composition in the image areas to an etchant. - View Dependent Claims (28)
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Specification