Method and apparatus for producing uniform process rates

• US 6,320,320 B1
• Filed: 11/15/1999
• Issued: 11/20/2001
• Est. Priority Date: 11/15/1999
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Bailey, Andrew D. III, Kuthi, Andras, Schoepp, Alan M.
• Primary Examiner(s): Wong, Don
• Assistant Examiner(s): Vu, Jimmy T.
• Application Number:
  US09/440,418
• Time in Patent Office: 736 Days
• Field of Search: 315/111.51, 315/111.21, 315/111.41, 315/111.81, 315/111.91, 156/345, 219/121.43
• US Class Current: 315/111.51
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32467 Material

Abstract

A plasma processing apparatus for processing a substrate with a plasma is disclosed. The apparatus includes a first RF power source having a first RF frequency, and a process chamber. Further, the apparatus includes a substantially circular antenna operatively coupled to the first RF power source and disposed above a plane defined by the substrate when the substrate is disposed within the process chamber for processing. The substantially circular antenna being configured to induce an electric field inside the process chamber with a first RF energy generated by the first RF power source. The substantially circular antenna including at least a first pair of concentric loops in a first plane and a second pair of concentric loops in a second plane. The first pair of concentric loops and the second pair of concentric loops being substantially identical and symmetrically aligned with one another. The substantially circular antenna forming an azimuthally symmetric plasma inside the process chamber. The apparatus also includes a coupling window disposed between the antenna and the process chamber. The coupling window being configured to allow the passage of the first RF energy from the antenna to the interior of the process chamber. The coupling window having a first layer and a second layer. The second layer being configured to substantially suppress the capacitive coupling formed between the substantially circular antenna and the plasma. The substantially circular antenna and the coupling window working together to produce a substantially uniform process rate across the surface of the substrate.

Claims

1. A plasma processing apparatus for processing a substrate with a plasma, comprising:

a first RF power source having a first RF frequency;

a process chamber;

a substantially circular antenna operatively coupled to said first RF power source and disposed above a plane defined by said substrate when said substrate is disposed within said process chamber for said processing, said substantially circular antenna being configured to induce an electric field inside said process chamber with a first RF energy generated by said first RF power source, said substantially circular antenna including at least a first pair of concentric loops in a first plane and a second pair of concentric loops in a second plane, said first pair of concentric loops and said second pair of concentric loops being substantially identical and symmetrically aligned with one another,

said substantially circular antenna forming an azimuthally symmetric plasma inside said process chamber; and

a coupling window disposed between said antenna and said process chamber, said coupling window being configured to allow the passage of said first RF energy from said antenna to the interior of said process chamber, said coupling window having a first layer and a second layer, said second layer being configured to substantially suppress the capacitive coupling formed between said substantially circular antenna and said plasma,

said substantially circular antenna and said coupling window working together to produce a substantially uniform process rate across the surface of said substrate.

2. The plasma processing apparatus as recited in claim 1 wherein said first pair of concentric loops is proximate to said second pair of concentric loops.

3. The plasma processing apparatus as recited in claim 1 wherein said first pair of concentric loops are stacked above said second pair of concentric loops.

4. The plasma processing apparatus as recited in claim 3 wherein said second pair of concentric loops shields a terminal voltage that is produced by said first pair of concentric loops.

5. The plasma processing apparatus as recited in claim 1 wherein said first pair of concentric loops has a first turn and a fourth turn, said second pair of concentric loops has a second turn and a third turn, said fourth turn having a larger diameter than said first turn and said third turn having a larger diameter than said second turn, said first turn being substantially identical to said second turn, and said third turn being substantially identical to said fourth turn, said first turn being disposed above said second turn, and said fourth turn being disposed above said third turn, said first turn being operatively coupled to said second turn, said second turn being operatively coupled to said third turn, said third turn being operative coupled to said fourth turn, each of said turns being arranged so that the current flow in each of said turns is in the same direction.

6. The plasma processing apparatus as recited in claim 5 wherein said first turn is proximate to said fourth turn and said second turn is proximate to said third turn, said proximity of said first turn to said fourth turn, and said second turn to said third turn substantially reducing radial variations in said substantially circular antenna.

7. The plasma processing apparatus as recited in claim 1 wherein said substantially circular antenna is aligned symmetrically about the center of said process chamber and said substrate when said substrate is disposed inside said process chamber, and wherein said substantially circular antenna is disposed above said substrate when said substrate is disposed inside said process chamber.

8. The plasma processing apparatus as recited in claim 1 wherein said substantially circular antenna is disposed proximate to said coupling window.

9. The plasma processing apparatus as recited in claim 1 wherein said first layer and said second layer of the coupling window are bonded together.

10. The plasma processing apparatus as recited in claim 1 wherein said second layer forms part of the inner peripheral surface of said process chamber.

11. The plasma processing apparatus as recited in claim 1 wherein said first layer is formed from a dielectric material.

12. The plasma processing apparatus as recited in claim 11 wherein said first layer is formed from a material selected from the group consisting essentially of Silicon Nitride or Aluminum Nitride.

13. The plasma processing apparatus as recited in claim 1 wherein said second layer is formed from a conductive material.

14. The plasma processing apparatus as recited in claim 13 wherein said second layer is formed from SiC having a resistivity from about 100 ohm-cm to about 10,000 ohm-cm.

15. The plasma processing apparatus as recited in claim 1 wherein said second layer said is formed from a material that is substantially resistant to said plasma present within said process chamber during said processing.

16. The plasma processing apparatus as recited in claim 15 wherein said second layer is formed from SiC.

17. The plasma processing apparatus as recited in claim 1 wherein said second layer is configured to be electrically floating.

18. The plasma processing apparatus as recited in claim 1 wherein said first RF frequency being configured at about 4 MHz.

19. The plasma processing apparatus as recited in claim 1 wherein said process chamber is a substantially cylindrical plasma processing chamber.

20. An antenna arrangement for generating an electric field inside a process chamber, said antenna arrangement comprising:

a first loop disposed around an antenna axis;

a second loop coupled to said first loop, said second loop having a geometry that is substantially similar to a geometry of said first loop, said second loop being disposed below said first loop and around said antenna axis such that said first and second loops are symmetrically aligned relative to said antenna axis, said first and second loops being arranged to carry a current therethrough, wherein each of the loops are arranged to the flow current in the same direction around said antenna axis.

21. The antenna arrangement as recited in claim 20 wherein said first RF frequency is configured at about 4 MHz.

31. The antenna arrangement as recited in claim 20 wherein said first and second loops comprise a plurality of concentric turns.

32. The antenna arrangement as recited in claim 31 wherein said first loop has at least a first turn and a fourth turn, and said second loop has at least a second turn and a third turn, said first and second turns having a substantially similar first geometry and said third and fourth turns having a substantially similar second geometry, said first turn being disposed above said second turn and said fourth turn being disposed above said third turn, the loops being arranged so that the current flows from the first turn to the second turn, from the second turn to the third turn, and from the third turn to the fourth turn.

33. The antenna arrangement as recited in claim 32 wherein said third and fourth turns are position further away from said antenna axis than said first and second turns.

34. The antenna arrangement as recited in claim 33 wherein said third and fourth turns are positioned proximate the first and second turns.

35. The antenna arrangement as recited in claim 34 wherein a dielectric medium is disposed between each of the turns so as to eliminate arcing therebetween.

36. The antenna arrangement as recited in claim 20 wherein the first and second loops have a combined length that is smaller than the wavelength of energy transmitted through the antenna arrangement.

37. The antenna arrangement as recited in claim 20 wherein said second loop effectively shields a terminal voltage of said first loop.

38. The antenna arrangement as recited in claim 20 wherein said first and second loops cooperate to form an azimuthally symmetric electric field inside a process chamber with a first RF energy generated by a first RF power source, wherein said azimuthally symmetric electric field forms a substantially azimuthally symmetric plasma, which produces a substantially uniform process rate across the surface of a substrate disposed inside of said process chamber.

39. The antenna arrangement as recited in claim 20 wherein said first loop is positioned in a first plane and said second loop is positioned in a second plane.

22. A coupling window arrangement for processing a substrate with a plasma inside a process chamber, said coupling window being disposed between an antenna and said process chamber, said antenna being configured for generating RF energy, said generating forming capacitive coupling between said antenna and said plasma, said coupling window arrangement comprising:

a first layer being formed from a dielectric material; and

a second layer bonded to said first layer, said second layer being formed from a material that is substantially resistant to said plasma present within said process chamber during said processing, said second layer forming part of the inner peripheral surface of said process chamber,

said first layer and said second layer being, configured to allow the passage of said RF energy from said antenna to the interior of said process chamber.

23. The coupling window arrangement as recited in claim 22 wherein said second layer is configured to substantially suppress said capacitive coupling formed between said antenna and said plasma during said generating.

24. The coupling window arrangement as recited in claim 23 wherein said second layer is formed from a conductive material.

25. The plasma processing apparatus as recited in claim 24 wherein said second layer is formed from SiC having a resistivity from about 100 ohm-cm to about 10,000 ohm-cm.

26. The coupling window arrangement as recited in claim 22 wherein said second layer is formed from a dielectric material.

27. The coupling window arrangement as recited in claim 26 wherein said second layer is formed from SiC having a resistivity of greater than 10⁶ ohm-cm.

28. The plasma processing apparatus as recited in claim 22 wherein said first layer is formed from a material selected from the group consisting essentially of Silicon Nitride or Aluminum Nitride.

29. The plasma processing apparatus as recited in claim 22 wherein said second layer is formed from SiC.

30. The plasma processing apparatus as recited in claim 22 wherein said second layer is configured to be electrically floating.

40. A plasma processing apparatus for processing a substrate, comprising:

a process chamber in which a plasma is both ignited and sustained for said processing;

a multi-layered antenna configured to produce an electric field via RF energy inside said process chamber, said antenna having a top loop and a bottom loop, which are substantially similar to one another, and which are symmetrically aligned relative to an antenna axis; and

a multi-layered window configured to allow the passage of said RF energy from said antenna to said process chamber, said window having a first layer and a second layer, said second layer being arranged to suppress capacitive coupling, which may occur between said plasma and said antenna.