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Angular velocity sensor device having oscillators

  • US 6,321,598 B1
  • Filed: 03/09/2000
  • Issued: 11/27/2001
  • Est. Priority Date: 03/12/1999
  • Status: Active Grant
First Claim
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1. An angular velocity sensor device comprising:

  • a sensor element including a movable portion which is oscillated by driving on a specific plane, and receives a Coriolis force generated in a specific direction parallel to the specific plane when an angular velocity is generated around an angular velocity axis perpendicular to the specific plane, the sensor element being for outputting at least one output signal in accordance with the Coriolis force; and

    a circuit portion electrically connected to the sensor element to receive the output signal from the sensor element, the circuit portion being for determining the angular velocity by a first signal caused by the Coriolis force and a second signal not caused by the Coriolis force, based on the output signal, the second signal being used as a reference.

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